离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜

doi:10.3724/SP.J.1077.2013.13363

无机材料学报 ›› 2014, Vol. 29 ›› Issue (4): 371-376.DOI: 10.3724/SP.J.1077.2013.13363 CSTR: 32189.14.SP.J.1077.2013.13363

离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜

张辉¹, 马永军², 王艺程¹, 文丹丹¹, 叶飞³, 白飞明¹

(1. 电子科技大学电子薄膜与集成器件国家重点实验室, 成都 610054; 2. 包头市第二热电厂, 包头014030; 3. 大连理工大学材料科学与工程学院, 大连 116024)

收稿日期:2013-07-16 修回日期:2013-10-11 出版日期:2014-04-20 网络出版日期:2014-03-24
作者简介:张辉(1987-), 男, 硕士研究生. E-mail: 897751636@qq.com
基金资助:
国家重大基础研究资助项目(2012CB933104); 国家自然科学基金(61271031); 中央高校科研业务费资助项目(ZYGX2010X009)

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering

ZHANG Hui¹, MA Yong-Jun², WANG Yi-Cheng¹, WEN Dan-Dan¹, YE Fei³, BAI Fei-Ming¹

(1. State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology, Chengdu 610054, China; 2. The Second Cogeneration Power Plant, Baotou 014030, China; 3. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China)

Received:2013-07-16 Revised:2013-10-11 Published:2014-04-20 Online:2014-03-24
About author:ZHANG Hui. E-mail: 897751636@qq.com
Supported by:
National Basic Research Program of China (2012CB933104); National Science Fund of China (61271031); Fundamental Research Funds for the Central Universities (ZYGX2010X009)

摘要/Abstract

摘要： 采用90°离轴磁控溅射法, 在MgAl₂O₄(001)单晶基片上自组装生长了Pb(Zr_0.52Ti_0.48)O₃-NiFe₂O₄ (PZT-NFO)复合磁电薄膜, 并研究了基片温度、氩氧比和溅射功率等因素对薄膜结构和性能的影响。结果表明, 适合生长PZT-NFO薄膜的条件为基片温度800℃, 氩氧比1:1, 溅射功率160 W。XRD测试显示, PZT-NFO薄膜为外延生长薄膜, 且PZT相与NFO相之间的垂直晶格失配非常小。AFM和SEM结构观察表明, 薄膜具有清晰的1-3维纳米复合结构, 铁磁相NFO纳米柱直径约为80~150 nm。降低氩氧比有助于NFO相的形成, 但溅射功率过大会造成1-3维结构向无规则0-3维结构转变。磁性能测量表明纳米复合薄膜的饱和磁化强度在120~160 kA/m之间, 低于块体的NFO相, 可能是由于两相的界面扩散所造成。

关键词: 纳米复合, 磁电效应, 磁控溅射, 自组装

Abstract: Self-assembled nanocomposite Pb(Zr_0.52Ti_0.48)O₃-NiFe₂O₄ films were prepared on the (001)-oriented MgAl₂O₄ substrates by a 90° off-axis magnetron sputtering method. The influences of substrate temperature, argon over oxygen ratio and sputtering power on the structure and properties of PZT-NFO nanocomposite films were studied. The optimal growth conditions are substrate temperature of 800 ℃, argon over oxygen ratio of 1:1 and sputtering power of 160 W. XRD studies reveal that the PZT-NFO film is epitaxial along both the in-plane and out-of-plane directions, and the vertical lattice mismatch between the PZT phase and the NFO phase is very small. AFM and SEM analysis show that the PZT-NFO films have clear 1-3 dimensional nanocomposite structure, and the diameter of NFO nanorods is 80-150 nm. Further decreasing argon over oxygen ratio is beneficial for the formation of NFO. However, increasing RF power causes a transition from an 1-3 dimensional nanocomposite to a 0-3 dimensional chaotic structure. Magnetic measurement shows that the saturation magnetization of NFO phase is 120-160 kA/m, lower than that of bulk NFO phase, possibly due to the interfacial diffusion between the NFO and the PZT phases.

Key words: nanocomposite, magnetoelectric effect, magnetron sputtering, self-assembly

中图分类号:

TM271
O482

张辉, 马永军, 王艺程, 文丹丹, 叶飞, 白飞明. 离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜[J]. 无机材料学报, 2014, 29(4): 371-376.

ZHANG Hui, MA Yong-Jun, WANG Yi-Cheng, WEN Dan-Dan, YE Fei, BAI Fei-Ming. Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering[J]. Journal of Inorganic Materials, 2014, 29(4): 371-376.

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离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering

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