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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

烧结技术对99BeO陶瓷材料结构与性能影响

钟朝位, 梁 剑, 张树人, 张韶华, 李 波   

  1. 电子科技大学 电子薄膜与集成器件重点实验室, 成都 610054
  • 收稿日期:2009-08-13 修回日期:2009-10-13 出版日期:2010-04-20 网络出版日期:2010-04-27

Effects of Sintering Techniques on the Microstructure and Performance of High Purity Beryllium Oxide Ceramics

ZHONG Chao-Wei, LIANG Jian, ZHANG Shu-Ren, ZHANG Shao-Hua, LI B   

  1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
  • Received:2009-08-13 Revised:2009-10-13 Published:2010-04-20 Online:2010-04-27

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摘要： 系统研究了传统烧结方法、台阶式烧结方法和两步烧结方法对99BeO陶瓷微结构和性能的影响.研究发现：台阶式烧结有助于99BeO陶瓷的晶粒细化,两步法烧结有助于提高99BeO陶瓷的热导率.实验优化了两步法中第一阶段烧结温度T1、第二阶段烧结温度T2及保温时间t等工艺参数.结果表明,在T1为1630℃,T2为1550℃,t为4h时可获得晶粒均匀、结构致密,热导率为308W/(m·K),密度为2.95g/cm3的99BeO陶瓷.

关键词: 两步法烧结, 99BeO陶瓷, 热导率, 密度, 晶粒尺寸

Abstract: The effects of traditional, multistep and two-step sintering technique on the microstructure and performance of high purity beryllium oxide ceramics were investigated. It was found that the grain size of 99BeO ceramics could be controlled by the multistep sintering method, and the thermal conductivity could be elevated via two-step sintering method. Moreover, the technique parameters of the twostep sintering method, such as the highest sintering temperature (T1), the final sintering temperature (T2) and holding time (t),were studied in detail. The results show that under the condition of T1=1630℃, T2=1550℃ and t=4h, 99 BeO oxide ceramics owing fine grain and compact structure were obtained with the thermal conductivity of 308W/(m·K), and the density of 2.95g/cm3.

Key words: two-step sintering technique, high purity beryllium oxide ceramics (99BeO), thermal conductivity, density, grain size

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