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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

氮化铝薄膜织构的极图法研究

许小红1,2; 武海顺2; 马文瑾2; 段静芳2; 李佐宜1   

  1. 1. 华中科技大学电子科学与技术系, 武汉 430074; 2. 山西师范大学化学与材料科学学院, 临汾 041004
  • 收稿日期:2002-01-29 修回日期:2002-03-18 出版日期:2003-03-20 网络出版日期:2003-03-20

Study on the Texture of AIN Thin Films by Using the Pole-figure Method

XU Xiao-Hong1,2; WU Hai-Shun2; MA Wen-Jin2; DUAN Jing-Fang2; LI Zuo-Yi1   

  1. 1. Department of Electronic Science and Technology; Huazhong University of Science and Technology; Wuhan 430074; China; 2. School of Chemistry and Materials Science; Shanxi Normal University; Linfen 041004; China
  • Received:2002-01-29 Revised:2002-03-18 Published:2003-03-20 Online:2003-03-20

PDF (PC)

1121

被引次数

9

摘要： 在X射线衍射结果的基础上,采用极图法研究了AIN薄膜以(DO2)和(100)面的取向分布,发现在一定条件下制备的AIN(002)有很强的织构,并通过极图法来确定X射线衍射所无法确定的AIN(100)面择优取向薄膜中各晶粒c轴间的关系.

关键词: 氮化铝薄膜, 极图, 织构

Abstract: Based on the X-ray diffraction results, the textures of aluminium nitride films were investigated by using the pole-figure method. Aluminium nitride thin films prepared have a high (002) plane texture, and most of the c-axis of particles are parallel with the normal of the substrate. Aluminium nitride thin films with (100) orientation are necessary, as they are applied to surface acoustic wave devices, and the pole-figure results are very useful for determining the c-axis of particles direction in the A1N (100) thin films.

Key words: aluminium nitride thin films, pole-figure method, texture

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