高级检索
无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

膜厚影响SnO2厚膜型气敏元件敏感特性的研究

傅军1; 董名友2   

  1. 1. 海南师范学院物理系, 海口 571158; 2. 海南海口科宇电子设备厂 海口 571100
  • 收稿日期:2000-11-21 修回日期:2001-01-04 出版日期:2001-11-20 网络出版日期:2001-11-20

Study on the Effects of Film Thickness on the Gas-Sensing Properties of SnO2 Thick Film Sensors

FU Jun1; DONG Ming-You2   

  1. 1. Department of physics; Hainan Normal University; Haikou 571158; China; 2. Hainan Haikou Ke Yu Electronic Component Factory Haikou 571100; China
  • Received:2000-11-21 Revised:2001-01-04 Published:2001-11-20 Online:2001-11-20

PDF (PC)

925

摘要： 采用丝网印刷技术制备不同膜厚ＳｎＯ２厚膜气敏试样，在不同温度下进行热处理后测定了试样的阻温曲线和对乙醇气体的灵敏度，结果表明制备不同膜厚试样的气体灵敏度不同，阻温曲线也不同．要制备灵敏度高、一致性好的气敏器件，调整控制膜厚和及其热处理温度至关重要．

关键词: SnO2气敏元件, 膜厚, 热处理, 气敏特征

Abstract: The effects of sintering temperature and film thickness on the gas-sensing properties of SnO2 thick film sensors were researched by measuring the ethanol gas sensitivity of the samples with different thickness films prepared by screen printing technology and sintered at different temperatures. The results show that different thickness films and different sintering temperatures greatly effect the gas-sensing properties of the samples.

Key words: SnO2 gas sensors, film thickness, sintering temperatures, gas-sensing properties

中图分类号: