无机材料学报

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低氟MOD法制备Zr掺杂YBCO薄膜的研究

叶 帅, 索红莉, 刘 敏, 汤 潇, 吴紫平, 周美玲   

  1. (北京工业大学 材料科学与工程学院, 国家教育部功能材料重点实验室, 北京100124)
  • 收稿日期:2009-04-13 修回日期:2009-06-04 出版日期:2009-11-20 网络出版日期:2010-04-22

Zr-doped YBCO Film Prepared by Fluorine-reduced MOD Method

YE Shuai, SUO Hong-Li, LIU Min, TANG Xiao, WU Zi-Ping, ZHOU Mei-Ling   

  1. (The Key Laboratory of Advanced Functional Materials, Ministry of Education, Beijing University of Technology, Beijing 100124, China)
  • Received:2009-04-13 Revised:2009-06-04 Published:2009-11-20 Online:2010-04-22

摘要: 在金属有机盐沉积(MOD)法制备YBCO薄膜的工艺中, 采用无F的α甲基丙烯酸铜取代原来的三氟乙酸铜, 可以降低前驱溶液中大约50%的氟含量. 研究表明, 该方法大大缩短了YBCO前驱薄膜受热分解的时间, 仅为原来的1/7. 通过XRD、SEM分析发现, 该方法可以制备成分单一、具有良好立方织构的YBCO薄膜, 且薄膜表面平整致密, 没有裂纹, 临界温度(Tc)达到了90K左右, 77K、自场下的临街电流密度(Jc)达到了2.84MA/cm2. 通过在制备的YBCO薄膜中引入6mol% 的 Zr元素掺杂, 有效地提高了YBCO薄膜在外加磁场下的超导性能.

关键词: α-甲基丙烯酸铜, 低氟MOD, YBCO薄膜, 掺杂

Abstract: Through replacing copper Tri-fluoroacetate by copper α-methacrylic in Metal Organic Deposition (MOD) process, the total amount of fluorine in YBCO precursor solution was reduced by about 50%. As a result, the calcination period for YBCO precurse film was dramatically reduced. The calcination time was reduced to 2h, only one seventh of that in all-Fluorine MOD process. X-ray diffraction and scanning electronic microscope (SEM) measurements show that YBCO films have strong YBCO(00l) peaks and crack-free surface. The critical temperture (Tc) and critical current density (Jc at self-field, 77K) are 90K and 2.84MA/cm2, respectively. Furthermore, the property of YBCO film prepared by the fluorine-reduced MOD method is enhanced greatly by incorporating 6mol% Zr element into the film.

Key words: copper α-methacrylic, flourine-reduced MOD, YBCO film, dopant

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