Journal of Inorganic Materials ›› 2014, Vol. 29 ›› Issue (4): 371-376.doi: 10.3724/SP.J.1077.2013.13363

• Research Paper • Previous Articles     Next Articles

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering

ZHANG Hui1, MA Yong-Jun2, WANG Yi-Cheng1, WEN Dan-Dan1, YE Fei3, BAI Fei-Ming1   

  1. (1. State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology, Chengdu 610054, China; 2. The Second Cogeneration Power Plant, Baotou 014030, China; 3. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China)
  • Received:2013-07-16 Revised:2013-10-11 Online:2014-04-20 Published:2014-03-24
  • Contact: BAI Fei-Ming.
  • About author:ZHANG Hui. E-mail:
  • Supported by:

    National Basic Research Program of China (2012CB933104); National Science Fund of China (61271031); Fundamental Research Funds for the Central Universities (ZYGX2010X009)

Abstract: Self-assembled nanocomposite Pb(Zr0.52Ti0.48)O3-NiFe2O4 films were prepared on the (001)-oriented MgAl2O4 substrates by a 90° off-axis magnetron sputtering method. The influences of substrate temperature, argon over oxygen ratio and sputtering power on the structure and properties of PZT-NFO nanocomposite films were studied. The optimal growth conditions are substrate temperature of 800 ℃, argon over oxygen ratio of 1:1 and sputtering power of 160 W. XRD studies reveal that the PZT-NFO film is epitaxial along both the in-plane and out-of-plane directions, and the vertical lattice mismatch between the PZT phase and the NFO phase is very small. AFM and SEM analysis show that the PZT-NFO films have clear 1-3 dimensional nanocomposite structure, and the diameter of NFO nanorods is 80-150 nm. Further decreasing argon over oxygen ratio is beneficial for the formation of NFO. However, increasing RF power causes a transition from an 1-3 dimensional nanocomposite to a 0-3 dimensional chaotic structure. Magnetic measurement shows that the saturation magnetization of NFO phase is 120-160 kA/m, lower than that of bulk NFO phase, possibly due to the interfacial diffusion between the NFO and the PZT phases.

Key words: nanocomposite, magnetoelectric effect, magnetron sputtering, self-assembly

CLC Number: 

  • TM271