Journal of Inorganic Materials

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Preparation of Hydro-oleophobic Silica Antireflective Coating

YAN Liang-Hong1,2, CHI Fang-Ting1,2, JIANG Xiao-Dong2, LU Hai-Bing2, YUAN Xiao-Dong2, JIANG Bo1   

  1. (1. College of Chemistry, Sichuan University, Chengdu 614004, China; 2. Research Center of Laser Fusion, China Academy of Engineering Physical, Mianyang 621900, China)
  • Received:2006-11-27 Revised:2007-03-22 Online:2007-11-20 Published:2007-11-20
  • Contact: JIANG Bo E-mail:Jiangbo@china.com

Abstract: Using tetraethoxylsilane as precursor, ammonia as catalyst, the hydro-oleophobic antireflective coating was prepared by sol-gel process along with fluoroalkylsilane self-assembly. The properties of the coatings were characterized with spectrophotometer, scanning probe microscope, spectroscopic ellipsometry, contact angle measurement and oil-resistant test. The results indicate that the peak transmittance of the hydro-oleophobic coatings is 99.8%, water contact angle is 118.0°, and polydimethyl siloxane oil angle is 74.5°. The oil-resistant test shows that the oil-resistant ability of the hydro-oleophobic silica antireflective coating is considerably improved compared with that of the common silica antireflective coating.

Key words: sol-gel, silica, antireflective coating, hydro-oleophobicity

CLC Number: 

  • TN24