Fabrication of Reaction-Sintered SisN4 Ceramic Microrotors

Journal of Inorganic Materials

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Fabrication of Reaction-Sintered SisN₄ Ceramic Microrotors

LI Jing-Feng; Sugimoto Shinya; Tanaka Shuji; Esashi Masayoshi

1. Key State Laboratory of New Ceramics and Fine Processing; Department of Materials Science and Engineering; Tsinghua University; Beijing 100084; China; 2. Department of Mechatronics and Precision Engineering; Graduate School of Engineering; Tohoku University; Sendai 980-8579; Japan

Received:2002-07-29 Revised:2002-09-17 Published:2003-09-20 Online:2003-09-20

Abstract

Abstract: This paper introduces a novel process for the microfabrication of Si₃N₄ ceramic microcomponents, which mainly consists of pre-sintering of Si powder
compacts, micromachining of pre-sintered Si performs and reaction sintering of the micromachined Si performs. The present process has its high potential for
Si₃N₄ 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of Si₃N₄
reaction sintering. Using this process, we fabricated a reaction-sintered Si₃N₄ceramic micro-turbine rotor that has a 5mm diameter, 1.2mm thickness, and whose blades are as thin as 70μm.

Key words: ceramic MEMS, microdevices, microfabrication, silicon nitride, ceramic turbine rotor

CLC Number:

TQ174

LI Jing-Feng,Sugimoto Shinya,Tanaka Shuji,Esashi Masayoshi. Fabrication of Reaction-Sintered SisN₄ Ceramic Microrotors[J]. Journal of Inorganic Materials.

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Fabrication of Reaction-Sintered SisN₄ Ceramic Microrotors

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