Piezoelectric High Temperature Liquid Droplet Spraying Component

doi:10.15541/jim20231001

Journal of Inorganic Materials ›› 2023, Vol. 38 ›› Issue (8): 987-988.DOI: 10.15541/jim20231001

Special Issue: 【信息功能】纪念殷之文先生诞辰105周年虚拟学术专辑

• SCI-TECH DEVELOPMENT • Previous Articles

Piezoelectric High Temperature Liquid Droplet Spraying Component

ZOU Kai¹^,²(), ZHANG Wenbin², GUAN Sheng², SUN Haiyi³, PENG Kailun³, ZOU Jiajie³, LI Xuehong³, WANG Cheng³, LENG Yuxin³, LIANG Ruihong², ZHOU Zhiyong²()

1. University of Chinese Academy of Sciences, Beijing 100049, China
2. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
3. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Received:2023-03-16 Revised:2023-04-07 Published:2023-08-20 Online:2023-04-11
Contact: ZHOU Zhiyong, professor. E-mail: zyzhou@mail.sic.ac.cn
About author:ZOU Kai (1997-), male, PhD candidate. E-mail: zoukai19@mails.ucas.ac.cn
Supported by:
Integrated Circuit Technology Support Special Project of Science and Technology Innovation Action Plan of Shanghai(20501110100)

Abstract

Abstract:

Extreme Ultra-Violet (EUV) lithography utilizes Laser Produced Plasma (LPP) technology to generate EUV light with a 13.5 nm wavelength by bombarding tin liquid droplets with high-power lasers. Piezoelectric high-temperature nozzle based on inverse-piezoelectric effect is the key component for obtaining high-frequency tin droplet targets. Here, breakthroughs have been made in the composition design, fine preparation of high-temperature micro piezoelectric ceramic tubes that can withstand temperatures up to 250 ℃, and structure design, fabrication and precise driving control of the piezoelectric high-temperature nozzle. Based on a self-constructed high-temperature tin droplets generation platform, a stable output of high-temperature tin droplet targets with repetition frequency of 20 kHz and diameter of 100 μm is successfully achieved.

Key words: EUV lithography, micro piezoelectric ceramic tube, piezoelectric high-temperature nozzle, high- temperature piezoelectric ceramic

CLC Number:

TQ174

ZOU Kai, ZHANG Wenbin, GUAN Sheng, SUN Haiyi, PENG Kailun, ZOU Jiajie, LI Xuehong, WANG Cheng, LENG Yuxin, LIANG Ruihong, ZHOU Zhiyong. Piezoelectric High Temperature Liquid Droplet Spraying Component[J]. Journal of Inorganic Materials, 2023, 38(8): 987-988.

Figures/Tables 1

References 10

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Piezoelectric High Temperature Liquid Droplet Spraying Component

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