Journal of Inorganic Materials ›› 2017, Vol. 32 ›› Issue (12): 1285-1291.DOI: 10.15541/jim20170072
• Orginal Article • Previous Articles Next Articles
DENG Zi-Qian1,2, LIU Min2,3, MAO Jie2, ZHANG Xiao-Feng2, CHEN Wen-Long2, CHEN Zhi-Kun2
Received:
2017-02-20
Revised:
2017-04-27
Published:
2017-12-20
Online:
2017-11-21
CLC Number:
DENG Zi-Qian, LIU Min, MAO Jie, ZHANG Xiao-Feng, CHEN Wen-Long, CHEN Zhi-Kun. Deposition Mechanism Based on Plasma Spray-Physical Vapor Deposition[J]. Journal of Inorganic Materials, 2017, 32(12): 1285-1291.
Gun | Power/ kW | Ar/ slpm | He/ slpm | Chamber pressure/Pa | Feed rate/ (g•min-1) | Stand-off distance/ mm |
---|---|---|---|---|---|---|
O3CP | 127 | 35 | 60 | 150 | 20 | 350, 650, 950, 1250, 1800 |
Table 1 Parameters of 7YSZ coating by PS-PVD
Gun | Power/ kW | Ar/ slpm | He/ slpm | Chamber pressure/Pa | Feed rate/ (g•min-1) | Stand-off distance/ mm |
---|---|---|---|---|---|---|
O3CP | 127 | 35 | 60 | 150 | 20 | 350, 650, 950, 1250, 1800 |
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