Transfer Printing of VO2 Thin Films Using MoS2/SiO2 van der Waals Heterojunctions

doi:10.15541/jim20190023

Abstract

Abstract:

In recent years, flexible electronic devices have attracted much attention due to the potential applications in the fields of the Internet of Things and bioelectronics. The integration of functional oxide materials in flexible polymers has been proven an effective way to achieve high performance flexible electronic devices. However, due to high fabrication temperatures, the synthesis of high-quality oxide films directly on flexible polymer substrates remains a significant challenge. This study proposed a method for transferring printing large-area VO₂ film based on MoS₂/SiO₂ van der Waals heterojunctions. Due to different hydrophilic and hydrophobic properties of MoS₂ and SiO₂ films, we can dissociate the MoS₂/SiO₂ van der Waals heterojunction interface only by using deionized water, and transfer printing the VO₂ films from Si/SiO₂/MoS₂/SiO₂/VO₂ to Si, SiO₂/Si and flexible substrates. X-ray diffraction (XRD) results showed that the crystal structure of VO₂ films has no difference before and after the transfer process. Temperature-dependent Raman spectrum and infrared reflectance spectrum demonstrate good metal-insulator transition (MIT) performance of VO₂ films before and after transferring printing. These results indicate an effective method for transferring printing functional oxide films, which enables low-temperature integration of VO₂ thin films on arbitrary substrates without introducing sacrificial layer and corrosive solvents. Our study provides a new way for integrating functional oxides for flexible wearable electronic devices applications.

Key words: vanadium oxide film, transfer printing, low-temperature integration, flexible electronic devices

CLC Number:

O484

XIAO Min, SUN Rui-Zhi, LI Yan-Fang, KANG Tong-Tong, QIN Jun, YANG Run, BI Lei. Transfer Printing of VO₂Thin Films Using MoS₂/SiO₂ van der Waals Heterojunctions[J]. Journal of Inorganic Materials, 2019, 34(11): 1161-1166.

Figures/Tables 6

Fig. 1 Schematic illustration of transfer printing process of VO2 film

Fig. 2 Microphotographs of the transferred VO2 films on different substrates (a) Transferred on Si; (b) Transferred on SiO2/Si; (c) Transferred on PDMS; (d) Transferred on PI

Fig. 3 Cross-sectional profile (a) before transfer printing and (b) original substrate after transfer printing

Fig. 4 XRD patterns of sample before and after transfer printing

Fig. 5 Temperature dependent Raman spectra before and after transfer printing (a) VO2/SiO2/MoS2/SiO2/Si before transfer printing; (b) Transferred VO2 on SiO2/Si substrate

Fig. 6 Temperature dependent infrared reflectance spectra before and after transfer printing (Colorful edition is available in pdf) (a) VO2/SiO2/MoS2/SiO2/Si before transfer printing; (b) Transferred VO2 on SiO2/Si substrate; (c) SiO2/Si substrate

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Transfer Printing of VO₂Thin Films Using MoS₂/SiO₂ van der Waals Heterojunctions

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