Humidity Sensing Property of LiCl/SiO2-Al2O3 Nano-Composite Film

Journal of Inorganic Materials

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Humidity Sensing Property of LiCl/SiO₂-Al₂O₃ Nano-Composite Film

ZHAO Peng¹; ZHAI Ji-Wei¹; ZHANG Liang-Ying^1,2; YAO Xi ^1,2

1. Electronic Materials Research Laboratory; Xi an Jiaotong University; Xi an 710049; China; 2. Functional Materials Research Laboratory; Tongji University; Shanghai 200092; China

Received:1999-01-26 Revised:1999-03-17 Published:1999-12-20 Online:1999-12-20

Abstract

Abstract: LiCl/SiO₂-Al₂O₃ films with good humidity sensing properties were prepared by sol-gel process. The film structure was investigated by using XRD and AFM. The results indicated that the impedance variety of the film with nano-phase separation structure was more than 3 order of magnitude, and there was a better linear relationship between logarithmic impedance and relative humidity; the moisture absorption response and dehydration response of this film were less than 30s and 60s respectively.

Key words: lithium chlorinate, thin film, nano-composite, humidity sensor

CLC Number:

TQ174

ZHAO Peng,ZHAI Ji-Wei,ZHANG Liang-Ying,YAO Xi. Humidity Sensing Property of LiCl/SiO₂-Al₂O₃ Nano-Composite Film[J]. Journal of Inorganic Materials.

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Humidity Sensing Property of LiCl/SiO₂-Al₂O₃ Nano-Composite Film

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