原子氢在纳米金刚石薄膜生长中的作用

摘要/Abstract

摘要： 探索了原子氢在各类制备条件下对纳米金刚石薄膜生长所起的作用,指出贫氢环境并不是纳米金刚石薄膜制备的必备条件,原子氢与Ar在贫氢环境和富氢环境中的作用机理不尽相同.通过施加衬底偏压能促进氢离子的产生,氢离子刻蚀sp²碳的能力比刻蚀sp³碳能力强很多,同时能产生表面缺陷,因而富原子氢环境更有利于纳米金刚石薄膜成核与生长.

关键词: 原子氢, 纳米金刚石薄膜, 衬底偏压, 成核, 生长

Abstract: The effects of atomic hydrogen on the growth of nanodiamond films were explored under different conditions of preparation. It is believed hydrogen-poor is not the necessary factor for preparation of nanodiamond films. The mechanisms of atomic hydrogen and Ar are different between the condition of hydrogen-poor and hydrogen-rich. Substrate bias fixed, can promote the production of H⁺. H⁺ can etch sp² carbon stronger than sp³ carbon, and can result in surfacspe defects. Therefore, the condition of hydrogen-rich will be assistant to the nucleation and growth of nanodiamond films.

Key words: atomic hydrogen, nanodiamond films, substrate bias, nucleation, growth

中图分类号:

O484
TN304

林良武,唐元洪,朱利兵. 原子氢在纳米金刚石薄膜生长中的作用[J]. 无机材料学报.

LIN Liang-Wu,TANG Yuan-Hong,ZHU Li-Bing. Effects of Atomic Hydrogen on Growth of Nanodiamond Films[J]. Journal of Inorganic Materials.

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