无机材料学报

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外加电场法制备LiNbO3周期畴的工艺研究

陈建华1,2, 屈绍波2,3, 魏晓勇2, 徐卓2, 朱林户3   

  1. (1. 空军工程大学工程学院, 西安 710038; 2. 西安交通大学电子陶瓷与器件教育部重点实验室, 西安 710049; 3. 空军工程大学理学院, 西安 710051)
  • 收稿日期:2007-08-30 修回日期:2007-12-23 出版日期:2008-07-20 网络出版日期:2008-07-20

Technology of Periodic Poling Bulk LiNbO3 by Applying External Field

CHEN Jian-Hua1,2, QU Shao-Bo2,3, WEI Xiao-Yong2, XU Zhuo2, ZHU Lin-Hu3   

  1. (1. The Engineering College, Airforce Engineering University, Xi’an 710038, China; 2. Electronic Materials Research Laboratory, Key Laboratory of Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, China; 3. The Science College, Airforce Engineering University, Xi’an 710051, China)
  • Received:2007-08-30 Revised:2007-12-23 Published:2008-07-20 Online:2008-07-20

摘要: 研究了LiNbO3单晶周期极化畴结构的制备工艺, 讨论了外电场的特性对周期极化过程的影响. 在对周期畴制备各工艺步骤进行实验研究的基础上, 提出解决LiNbO3单晶周期畴制备中一直存在的边缘击穿问题, 必须选择合适的周期电极形式并对脉冲波形进行优化. 采用所提出的工艺, LiNbO3周期极化畴的成品率提高到了90%. 为解决周期极化过程中反转畴的侧向扩展, 在对周期极化物理过程进行分析的基础上, 采取了对周期电极宽度进行优化设计和在样品上包覆聚酰亚胺绝缘胶的方法, 有效克服了这一问题, 制备了占空比符合预期的高质量的周期畴结构.

关键词: LiNbO3周期极化畴, 介电击穿, 畴扩展

Abstract: The preparation technics of periodically poled LiNbO3 crystal (PPLN) was studied and the effects of external field characteristics including magnitude, duration of voltage pulse on periodic poling process were investigated. Improving magnitude of pulse could accelerate the poling process. After a detailed study of all technological steps, a resolution to overvcoming fringe breakdown is proposed, i.e. appropriate electrode figure and optimum waveform must be selected. By using the technics proposed, ratio of finished product reaches 90%. To eliminate the negative effects of reverse domain side expansion, a thin insulator layer is coated on the samples and the electrode width is optimized. By this method, high-quality periodically poled LiNbO3, which meets the expected occupation ratio perfectly, is prepared successfully.

Key words: periodically poled LiNbO3, dielectric breakdown, domain broadening

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