无机材料学报

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提拉法Tm:YAG晶体的生长缺陷研究

宋平新1,2; 赵志伟1; 徐晓东1,2; 邓佩珍1; 徐军1   

  1. 1. 中国科学院上海光学精密机械研究所, 上海 201800; 2. 中国科学院研究生院, 北京 100039
  • 收稿日期:2004-05-28 修回日期:2004-08-12 出版日期:2005-07-20 网络出版日期:2005-07-20

Defect Study of Tm:YAG Crystal

SONG Ping-Xin1,2; ZHAO Zhi-Wei1; XU Xiao-Dong1,2; DENG Pei-Zhen1; XU Jun1   

  1. 1.Shanghai Institute of Optics and Fine Mechanics; Chinese Academy of Sciences; Shanghai 201800; China; 2.Graduate School of Chinese Academy of Sciences; Beijing 100039; China
  • Received:2004-05-28 Revised:2004-08-12 Published:2005-07-20 Online:2005-07-20

摘要: 采用提拉法(CZ)生长了质量优异的Tm:YAG晶体.部分晶片在1000℃的空气气氛中退火25h.借助光学显微镜、扫描电子显微镜(SEM),结合化学腐蚀法,对Tm:YAG晶体退火前后(111)面的缺陷特征进行了研究. Tm:YAG晶体(111)面的位错腐蚀坑呈三角形. 在偏光显微镜下观察了退火前后Tm:YAG晶体(111)面的应力双折射.同时应用高分辨X射线衍射法测定了晶体的完整性.实验结果表明,长时间空气气氛下高温退火有效降低了晶体中总的位错密度,提高了晶体质量.

关键词: Tm:YAG晶体, 化学腐蚀, 位错, 退火

Abstract: Tm:YAG crystal with high quality was grown by the Czochralski method. Some of the samples were annealed at 1000℃ for 25h in the air. Chemical corrosion was used to the slices of Tm:YAG crystal before and after air annealing. The etch pits in
(111) plane were observed by Leitz optical microscope and scanning electron microscope (SEM). The shapes of etch pits located in (111) plane
exhibit as a triangle structure. Stress birefringence of Tm:YAG slices as grown and after air annealing was investigated by polarization microscope.
The lattice integrality of Tm:YAG crystal was investigated by high-resolution X-ray diffraction. The air annealing on slices for long time in high
temperature can reduce the total density of the dislocations, and improve the quality of the crystals.

Key words: Tm:YAG crystal, chemical etch, dislocation, annealing

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