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无机材料学报

无机材料学报

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水基溶胶-凝胶法制备Ba0.5Sr0.5TiO3薄膜及其介电性能研究

齐兵; 何夕云; 丁爱丽; 仇萍荪; 陈先同; 罗维根   

  1. 中国科学院上海硅酸盐研究所; 上海 200050
  • 收稿日期:1997-05-09 修回日期:1997-05-23 出版日期:1998-06-20 网络出版日期:1998-06-20

Properties of Ba0.5Sr0.5TiO3 Thin Films Prepared by Water-Based Sol-Gel Process

QI Bing; HE Xi-Yun; DING Ai-Li; QIU Ping-Sun; CHEN Xian-Tong; LUO Wei-Gen   

  1. Shanghai Institute of Ceramics; Chinese Academy of Sciences Shanghai 200050 China
  • Received:1997-05-09 Revised:1997-05-23 Published:1998-06-20 Online:1998-06-20

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摘要： 本文研究了一种以水为溶剂的Ba0．5Sr0.5TiO3（BST）液体源溶液，并用Sol－Gel技术制备出BST薄膜，实验中，对水基BST液体源浓缩凝胶进行了DTA／TGA分析，XRD谱分析显示，BST膜呈现纯钙钛矿相结构．从SEM电镜照片可以看到，BST薄膜厚度均匀一致，650℃热处理20min后，晶粒大小为200nm左右．性能测试结果表明，介电性能与膜厚有关，厚度为1250A的BST薄膜具有较优良的介电性能，当测试频率为1kHz时，介电常数为330，介电损耗为0.043左右．

关键词: 钙钛矿, 介电常数, 介电损耗, 溶胶-凝胶法

Abstract: A new liquid source using water as a solvent was studied to prepare Ba0.5Sr0.5TiO3 (BST) thin films by Sol-Gel
technique. DTA/TGA methods were employed to analyze this water-based BST liquid source gel. XRD results show that the film exhibits a completely
pure perovskite phase. SEM photographs show that the thickness of the films is homogeneous, and the grain size of the thin films annealed at 650℃
for 20min is about 200nm. It is found that the thickness of the film plays an important role in the dielectric properties of the BST films. The BST films
of one layer with the thickness of 1250A have better dielectric properties than those of the multilayers. The dielectric constant and dielectric loss for single
layer BST films are 330 and 0.043 at 1kHz, respectively.

Key words: perovskite, dielectric constant, dielectric loss, sol-gel

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