Phase Structure Development and Composition Analysis of PZT Thin Films Prepared by Metallo-organic Decomposition

Abstract

Abstract: PZT thin films were prepared by metallo-organic decomposition(MOD). Phase transformation from pyrochlore to perovskite was studied by XRD and TEM.
XRD analysis showed that pyrochlore phase transformes into perovskite phase fully above 600℃for the PZT thin films on Pt/Ti/SiO₂/Si
substrates. However, TEM results indicated, for the free-standing PZT thin films on Pt foil with many microholes, that the transforming
temperature from pyrochlore to perovskite is much higher, and the temperature is related to the thickness of thin films. The surface
states of MOD derived PZT thin films were investigated by X-ray photoelectron spectroscopy(XPS) with whole and narrow scanning
measurement. The results showed that there are chemical-absorbed oxygen and contamination of carbon in the film surfaces which came
from sample handling or pumping oil. Other impurity could not be detected. The films have a little Pb-rich in the surface and a
stoichiometry of Zr/Ti ratio. However, the crystal lattice of the thin film is oxygen-deficiency.

Key words: PZT thin film, phase transition, composition analysis

CLC Number:

O484

BAO Ding-Hua,WU Xiao-Qing,ZHANG Liang-Ying,YAO Xi. Phase Structure Development and Composition Analysis of PZT Thin Films Prepared by Metallo-organic Decomposition[J]. Journal of Inorganic Materials.

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