Fabrication of Zinc Oxide Thin Films by Magnetron Sputtering Based on Opal Template and its Optical Properties

doi:10.3724/SP.J.1077.2007.01117

Abstract

Abstract: By using polystyrene opal template as substrate, zinc oxide film samples were prepared by a magnetron sputtering process. The structure and optical properties of the fabricated samples were analyzed by FTIR, XRD, UV-VIS and PL spectra. The results of SEM analysis show that the PS template has a multi-layer structure consisting of periodically hexagonal array of polystyrene spheres in three dimensions and the zinc oxide film has a surface morphology arrayed by ZnO hollow hemispheres like nanobowls with high smooth and density. These imply that zinc oxide can be deposited on the template without destroying the structure of polystyrene opal template during sputtering process. Therefore the zinc oxide produced by magnetron sputtering duplicates the surface structure of the opal template. PL spectra show that the photoluminescence intensity of the composite of zinc oxide and opal template is 4--5 times stronger than that of the template removed zinc oxide film.

Key words: zinc oxide, opal, magnetron sputtering, photonic crystal

CLC Number:

O734

ZHANG La-Bao,XIONG Yu-Ying,CHU Ben-Li,YU Hong-Hua,XIAO Hua. Fabrication of Zinc Oxide Thin Films by Magnetron Sputtering Based on Opal Template and its Optical Properties[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2007.01117.

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Fabrication of Zinc Oxide Thin Films by Magnetron Sputtering Based on Opal Template and its Optical Properties

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