Journal of Inorganic Materials

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Influence of Mn-Mg Co-doping on the Dielectric Properties of Barium Strontiun
Titanate Thin Film

ZHOU Qi-Gang 1,2, ZHAI Ji-Wei 1, YAO Xi 1   

  1. 1. Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China; 2. Dept. of Physics & Electronic Information Science, Leshan Teacher’s College, Sichuan Leshan 614004, China
  • Received:2006-05-15 Revised:2006-07-03 Published:2007-05-20 Online:2007-05-20

Abstract: Undoped and Mn-Mg co-doped barium strontiun titanate (Ba0.25Sr0.75TiO3) thin films were deposited on Pt/Ti/SiO2/Si substrates by a sol-gel technique. X-ray diffraction (XRD) analysis and FE- SEM reveal that the films exhibite a pure perovskite phasestructure, uniform grain sizes and crack-fee. The dielectric constant, loss, tunability and leakage current density are 200, 0.010, 38%, 1×10 -5 A/cm 2, respectively, at a 1mol% Mn-Mg content. The improved BST thin films can be used for tunable microwave devices.

Key words: BST thin film, Mn-Mg co-doping, sol-gel, dielectric property

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