用光刻、软刻和氧化硅球晶体模板制备表面微结构

无机材料学报

用光刻、软刻和氧化硅球晶体模板制备表面微结构

徐键, 夏海平, 张约品, 章践立, 王金浩

宁波大学信息科学与工程学院, 宁波 315211

收稿日期:2003-12-04 修回日期:2004-03-08 出版日期:2005-01-20 网络出版日期:2005-01-20

Micro/Nano-structured Surfaces Prepared by Photolithography, Soft-lithography and the Template of Colloidal Silica Spheres

XU Jian, XIA Hai-Ping, ZHANG Yue-Pin, ZHANG Jian-Li, WANG Jin-Hao

Laboratory of Opto-Electronic Materials, Ningbo University, Ningbo 315211, China

Received:2003-12-04 Revised:2004-03-08 Published:2005-01-20 Online:2005-01-20

摘要/Abstract

摘要： 表面微结构的制备对获得超疏水性表面和改善生物医学材料性能具有重要意义. 为了制备微米、亚微米和纳米级表面微结构, 本文采用光刻(photo-lithography)和软刻技术(soft lithography)
制备了微米尺寸长方体或圆柱体的阵列, 压印出变形长方体(塔状)或圆柱体(圆盘状)阵列的微结构表面; 采用单分散氧化硅球自集聚紧密堆积而成的胶体晶体为模板, 制备了亚微米/纳米
尺寸网状微结构的表面. 用光学和扫描电子显微镜表征了所获得的表面微结构.

关键词: 微结构, 光刻, 软刻, 氧化硅球

Abstract: The preparation of the micro/nano-stuctured surfaces is important for wetting study of material surfaces and application of biomaterials, in order to obtain super-hydrophobility or meet well the requirement
of the biological environments. In the present work, preparation of micron and sub-micron/nano-scale structured surfaces was studied. Micro-scale square or round structures on the surfaces were prepared
by photo-lithography; the distorted square or round structures such as tower-shape and disc-shape structures were imprinted by soft-lithography; the sub-micron/nano-scale net structured surfaces were
prepared by using self-assembled silica colloidal crystals as the template and infiltration of polystyrene-toluene solution in the crystals. The surface features of the samples were investigated by optical and scanning electron microscopy (SEM).

Key words: surface, micro/nano-structure, photo-lithography, soft-lithography, silica sphere, template

中图分类号:

TB383
O484

徐键,夏海平,张约品,章践立,王金浩. 用光刻、软刻和氧化硅球晶体模板制备表面微结构[J]. 无机材料学报.

XU Jian,XIA Hai-Ping,ZHANG Yue-Pin,ZHANG Jian-Li,WANG Jin-Hao. Micro/Nano-structured Surfaces Prepared by Photolithography, Soft-lithography and the Template of Colloidal Silica Spheres[J]. Journal of Inorganic Materials.

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