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无机材料学报

无机材料学报 ›› 2023, Vol. 38 ›› Issue (8): 987-988.DOI: 10.15541/jim20231001 CSTR: 32189.14.10.15541/jim20231001

所属专题： 【信息功能】纪念殷之文先生诞辰105周年虚拟学术专辑

• 科技进展 • 上一篇    

压电式高温液滴喷射元件研制

邹凯1,2(), 张文斌2, 关胜2, 孙海轶3, 彭凯伦3, 邹家杰3, 李学红3, 王成3, 冷雨欣3, 梁瑞虹2, 周志勇2()   

  1. 1.中国科学院大学, 北京100049
    2.中国科学院 上海硅酸盐研究所, 上海200050
    3.中国科学院 上海光学精密机械研究所, 上海 201800
  • 收稿日期:2023-03-16 修回日期:2023-04-07 出版日期:2023-08-20 网络出版日期:2023-04-11
  • 通讯作者: 周志勇, 研究员. E-mail: zyzhou@mail.sic.ac.cn
  • 作者简介:邹 凯(1997-), 男, 博士研究生. E-mail: zoukai19@mails.ucas.ac.cn
  • 基金资助:
    上海市科委集成电路科技支撑专项项目(20501110100)

Piezoelectric High Temperature Liquid Droplet Spraying Component

ZOU Kai1,2(), ZHANG Wenbin2, GUAN Sheng2, SUN Haiyi3, PENG Kailun3, ZOU Jiajie3, LI Xuehong3, WANG Cheng3, LENG Yuxin3, LIANG Ruihong2, ZHOU Zhiyong2()   

  1. 1. University of Chinese Academy of Sciences, Beijing 100049, China
    2. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
    3. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • Received:2023-03-16 Revised:2023-04-07 Published:2023-08-20 Online:2023-04-11
  • Contact: ZHOU Zhiyong, professor. E-mail: zyzhou@mail.sic.ac.cn
  • About author:ZOU Kai (1997-), male, PhD candidate. E-mail: zoukai19@mails.ucas.ac.cn
  • Supported by:
    Integrated Circuit Technology Support Special Project of Science and Technology Innovation Action Plan of Shanghai(20501110100)

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摘要：

极紫外(Extreme ultra-violet, EUV)光刻机光源主要采用激光产生等离子体技术, 用高功率激光轰击锡液滴靶产生13.5 nm波长的EUV光。其中, 基于逆压电效应的压电式高温锡液滴喷射元件是获取高重频高温锡液滴靶的关键部件。本项工作突破了耐250 ℃高温微细压电陶瓷管的组成设计和精细制备, 以及高温锡液滴喷射元件的结构设计和封装等关键技术, 成功研制了压电式高温液滴喷射元件。并通过自主搭建高温锡液滴靶光学检测平台, 基于此高温液滴喷射元件实现了重复频率20 kHz, 直径~100 μm的高温锡液滴靶的稳定输出。

关键词: 极紫外光刻, 微细压电陶瓷管, 高温液滴发生器, 高温压电陶瓷

Abstract:

Extreme Ultra-Violet (EUV) lithography utilizes Laser Produced Plasma (LPP) technology to generate EUV light with a 13.5 nm wavelength by bombarding tin liquid droplets with high-power lasers. Piezoelectric high-temperature nozzle based on inverse-piezoelectric effect is the key component for obtaining high-frequency tin droplet targets. Here, breakthroughs have been made in the composition design, fine preparation of high-temperature micro piezoelectric ceramic tubes that can withstand temperatures up to 250 ℃, and structure design, fabrication and precise driving control of the piezoelectric high-temperature nozzle. Based on a self-constructed high-temperature tin droplets generation platform, a stable output of high-temperature tin droplet targets with repetition frequency of 20 kHz and diameter of 100 μm is successfully achieved.

Key words: EUV lithography, micro piezoelectric ceramic tube, piezoelectric high-temperature nozzle, high- temperature piezoelectric ceramic

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