TiN/VCN多层膜的力学性能及摩擦磨损性能研究

doi:10.3724/SP.J.1077.2013.12196

无机材料学报 ›› 2013, Vol. 28 ›› Issue (2): 195-200.DOI: 10.3724/SP.J.1077.2013.12196 CSTR: 32189.14.SP.J.1077.2013.12196

TiN/VCN多层膜的力学性能及摩擦磨损性能研究

曹峻, 许俊华, 喻利花

(江苏科技大学江苏省先进焊接技术重点实验室, 镇江 212003)

收稿日期:2012-03-29 修回日期:2012-07-14 出版日期:2013-02-10 网络出版日期:2013-01-23
作者简介:曹峻(1986–), 男, 硕士研究生. E-mail: caojun393@163.com
基金资助:
国家自然科学基金(51074080);江苏省自然科学基金(BK2008240);江苏省研究生科研创新计划(CXLX11_0292)

Mechanical Properties and Tribological Performance of TiN/VCN Multilayers

CAO Jun, XU Jun-Hua, YU Li-Hua

(Jiangsu Key Laboratory of Advanced Welding Technology, Jiangsu University of Science and Technology, Zhenjiang 212003, China)

Received:2012-03-29 Revised:2012-07-14 Published:2013-02-10 Online:2013-01-23
About author:CAO Jun. E-mail: caojun393@163.com
Supported by:
National Natural Science Foundation of China (51074080);Natural Science Foundation of Jiangsu Province (BK2008240);Scientific Research Innovation Program of Graduate Students of JiangSu Province (CXLX11_0292)

摘要/Abstract

摘要：

采用多靶磁控溅射技术, 制备了TiN、VCN单层膜及调制比为1:1的系列调制周期的TiN/VCN多层膜。利用X射线衍射仪、纳米压痕仪、高温摩擦磨损测试仪和扫描电子显微镜研究了各种薄膜的微结构、力学性能及室温和高温摩擦磨损性能。研究表明: TiN/VCN多层膜以δ-NaCl面心立方结构为主; TiN/VCN多层膜的最大硬度值为28.71 GPa, 约为按混合法则计算所得理论硬度值的1.23倍, 并据此分析了TiN/VCN多层膜的致硬机理; TiN/VCN多层膜在室温下摩擦系数与TiN单层膜摩擦系数相近, 但当环境温度为700℃时, 摩擦系数约0.4, 较TiN单层膜(0.52)低。TiN/VCN多层膜室温和高温下的磨损率相比TiN单层膜减小了约3×10^-14 m³/(N·m)。从晶体化学和热测量方法角度讨论了TiN/VCN多层膜的Magnéli相V₂O₅的润滑机制。

关键词: TiN/VCN, 磁控溅射, 力学性能, 摩擦磨损性能, Magné, li相

Abstract:

Monolithic TiN, VCN films and TiN/VCN nano-multilayer films with different modulation periods were prepared by magnetron sputtering. Microstructures, mechanical properties and friction properties at room and high temperature of these films were investigated by X-ray diffraction (XRD), nano-indentation, and CSM high temperature ball-on-disc tribometer. The results show that the TiN/VCN multilayer films are mainly nanocrystalline with δ-NaCl fcc structure. Maximum hardness of TiN/VCN multilayer films is 28.71 GPa, about 23% higher than the value calculated by the rule of mixtures. Based on these data, a mechanism of the superhardness in this system is proposed. Friction coefficients of TiN/VCN multilayers are similar to that of TiN films at room temperature, but lower than that of TiN films when testing temperature is increased to 700℃. Wear rates of TiN/VCN multilayers at room and high temperature decrease about 3×10^-14 m³/(N·m) comparing to that of single layer film. The lubrication mechanism of Magnéli phase (V₂O₅) is discussed in terms of crystal chemistry and thermal measurement methods. In conclusion, compared to TiN films, the friction and wear properties of TiN/VCN multilayer films are greatly improved.

Key words: TiN/VCN, magnetron sputtering, mechanical properties, friction properties, Magn&#x000e9, li phase

中图分类号:

TG174

曹峻, 许俊华, 喻利花. TiN/VCN多层膜的力学性能及摩擦磨损性能研究[J]. 无机材料学报, 2013, 28(2): 195-200.

CAO Jun, XU Jun-Hua, YU Li-Hua. Mechanical Properties and Tribological Performance of TiN/VCN Multilayers[J]. Journal of Inorganic Materials, 2013, 28(2): 195-200.

图/表 7

Table 1 Process parameters of the films

Sample	Films	Modulation period/nm
A	TiN	-
B	VCN	-
C	TiN/VCN-2	2
D	TiN/VCN-5	5
E	TiN/VCN-7	7
F	TiN/VCN-10	10

图1 TiN、VCN及TiN/VCN多层膜的XRD图谱

Fig. 1 XRD patterns of TiN、VCN films and TiN/VCN multilayer films

图2 不同调制周期的TiN/VCN多层膜(调制比为1)的显微硬度

Fig. 2 Microhardness of TiN、VCN films and TiN/VCN multilayer films

Table 2 Friction coefficient and wear rate of different films at room temperature

Sample	TiN	VCN	TiN/VCN-2	TiN/VCN-5	TiN/VCN-7	TiN/VCN-10
Friction coefficient	0.57	0.36	0.65	0.62	0.66	0.58
Wear rate /(×10^-14, m³·N^-1·m^-1)	5.91	2.22	1.23	3.64	2.45	3.35

Table 3 Friction coefficient and wear rate of different films at 700℃

Sample	TiN	VCN	TiN/VCN-2	TiN/VCN-5	TiN/VCN-7	TiN/VCN-10
Friction coefficient	0.52	0.40	0.40	0.46	0.41	0.41
Wear rate /(×10^-14, m³·N^-1·m^-1)	10.97	6.89	11.20	7.24	7.88	9.23

图3 TiN(a)和VCN(b)单层膜700℃摩擦磨损试验后的磨痕SEM照片

Fig.3 SEM images of wear scar of TiN (a) and VCN (b) single films at 700℃

图4 调制周期为10 nm的TiN/VCN多层膜700℃摩擦磨损实验后磨痕照片和成分分析

Fig. 4 SEM images and EDS analysis of wear scar of TiN/VCN multilayer films with 10 nm modulation periods at 700℃

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TiN/VCN多层膜的力学性能及摩擦磨损性能研究

Mechanical Properties and Tribological Performance of TiN/VCN Multilayers

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