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无机材料学报

无机材料学报

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BaPbO3 导电薄膜的制备、结构及性能研究

陆裕东, 王歆, 庄志强   

  1. 华南理工大学材料学院, 广州 510640
  • 收稿日期:2006-02-17 修回日期:2006-04-04 出版日期:2007-01-20 网络出版日期:2007-01-20

Preparation, Microstructure, and Conductive Properties of BaPbO3 Thin Films

LU Yu-Dong, WANG Xin, ZHUANG Zhi-Qiang   

  1. College of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China
  • Received:2006-02-17 Revised:2006-04-04 Published:2007-01-20 Online:2007-01-20

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摘要： 以可溶性无机盐为原料, EDTA 、柠檬酸、酒石酸为复合螯合剂, 水为溶剂, 采用改进的溶胶-凝胶法制备了无裂纹、晶粒尺寸小且均匀分布的钙钛矿结构的BaPbO3 导电薄膜. 利用XRD、SEM和EDS表征方法结合薄膜方阻的测定, 具体分析了Pb/Ba比和晶粒生长情况对BaPbO3 薄膜导电性能的影响. 实验结果表明: Pb/Ba比和晶粒生长情况是决定BaPbO3薄膜导电性的两个主要因素, Pb/Ba比的上升和晶粒的长大, 都会提高BaPbO3薄膜的导电性能; 热处理次数对BaPbO3 薄膜方阻的影响与薄膜厚度有关. 在700℃下保温10min的快速热处理方法, 可以获得钙钛矿结构、薄膜方阻为5.86 Ω﹒□-1 的BaPbO3 薄膜.

关键词: BaPbO3, 陶瓷, 薄膜, sol-gel, 薄膜方阻

Abstract: Crackfree and small grain size perovskite-type ceramic BaPbO3 conductive thin films were deposited onto Al2O3 substrates by a modified sol-gel method using ethylene diamine tetra-acetic acid (EDTA), citric acid, and tartaric acid as the complex chelate agent. XRD, SEM, and EDS tests, together with resistivity date,
show a good correlation among the Pb to Ba ratio, grain size, and sheet
resistance. Experimental results demonstrate that BaPbO3 thin films with
homogeneous composition can be prepared by the method mentioned above.
Sheet resistance of BaPbO3 thin films decreases with Pb to Ba ratio or grain size increases. The influence of heat treatment on sheet resistance is related with the thickness of BaPbO3 thin films. The best electrical properties were obtained upon a rapid thermal anneal (RTA) at 700℃ for 10 min. Perovskite BaPbO3 films with sheet resistance of 5.86Ω﹒□-1 were derived from 20 spin-coating layers and annealed at 700℃ for 10min.

Key words: BaPbO3, ceramic, thin film, sol-gel, sheet resistance

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