A New Sol-Gel Approach to Prepare MgO Thin Films

Journal of Inorganic Materials

• Research Paper • Previous Articles

A New Sol-Gel Approach to Prepare MgO Thin Films

FU Xiao-Rong¹; WU Guang-Ming²; SONG Zhi-Tang¹; DUO Xin-Zhong¹; LIN Cheng-Lu¹

1.National Key Laboratory of Functional Material for Informatics; Shanghai Institute of MetallurgyChinese Academy of Sciencs Shanghai 200050 China;

2. Beijing Institute of Petrochemical Technology Beijing 102600 China

Received:1998-11-05 Revised:1998-12-31 Published:1999-10-20 Online:1999-10-20

Abstract

Abstract: MgO thin films were successfully prepared on Si substrate by a novel and simple Sol-Gelmethod. The results indicated that collodion is a key element to form stable MgO sols. Thestructures of MgO films are closely related to the amount of collodion and the annealing temperature. In addition, the microstructures of the MgO thin films were examined with X-ray distraction(XRD), Atomic Force Morphology (AFM) and Transmission Electron Micrograph (TEM).

Key words: MgO, thin films, Sol-Gel method

CLC Number:

O484

FU Xiao-Rong,WU Guang-Ming,SONG Zhi-Tang,DUO Xin-Zhong,LIN Cheng-Lu. A New Sol-Gel Approach to Prepare MgO Thin Films[J]. Journal of Inorganic Materials.

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A New Sol-Gel Approach to Prepare MgO Thin Films

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