Joining of Molten Salt Reaction Metallized Si3N4 to Si3N4

Abstract

Abstract: Based on the deposition of titanium films on Si₃N₄ surface by molten salt reactions, the wetting behavior of a liquid CuAg eutectic
alloy on the titanium metallized Si₃N₄ was studied, it was found that, the metallized sample can be fully wetted by the eutectic
alloy. Based on this result, the joining of metallized Si₃N₄ to Si₃N₄ was successfully obtained and the joining technique
was systematically studied. TEM observation on the interfacial structure of the joints found that Ti-Cu-Si-N phases widely existed
at the interface and their possible effects on the shear strength of the joints were also discussed.

Key words: titanium, metallization, Si₃N₄, joining, interfacial structure

CLC Number:

TQ174

CHEN Jian,PAN Wei,ZHENG Shi-Yuan,HUANG Yong. Joining of Molten Salt Reaction Metallized Si₃N₄ to Si₃N₄[J]. Journal of Inorganic Materials.

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Joining of Molten Salt Reaction Metallized Si₃N₄ to Si₃N₄

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