Electrical Properties of Thick Lead Zirconate Titanate Films Fabricated Using a New Sol-Gel Processing

Abstract

Abstract: Lead zirconate titanate (Pb(Zr_0.53Ti_0.47)O₃, PZT) ferroelectric films 2-60μm in thickness were successfully fabricated on Pt-coated oxidized
Si substrates(Pt/Ti/SiO₂/Si) by a new sol gel processing. The microstructure and morphology of the prepared PZT thick films were
investigated via X-ray diffractometry and scanning electron microscopy techniques. X-ray diffraction patterns taken on these films show
single-phase perovskite-type structure, and no pyrochlore phase exists in thick films, and SEM micrographs suggest that the PZT thick films
are of high density, crack-free, and uniformity. Dielectric constant of 860, loss tangent of 0.03, remanent polarization of 25μC/cm², a coercive field of 40kV/cm were measured on 50μm thick films.

Key words: ferroelectric thick film, lead zirconate titanate (PZT), sol-gel technique, dielectric properties, ferroelectric properties

CLC Number:

TQ174

XIA Dong-Lin,LIU Mei-Dong,ZENG Yi-Ke,LI Jun,HUANG Yan-Qiu,LIU Shao-Bo. Electrical Properties of Thick Lead Zirconate Titanate Films Fabricated Using a New Sol-Gel Processing[J]. Journal of Inorganic Materials.

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Electrical Properties of Thick Lead Zirconate Titanate Films Fabricated Using a New Sol-Gel Processing

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