Abstract: Thin films of lithium cobalt oxides were synthesized by the soft solution processing in a home-made solution. Films of LiCoO₂ were deposited
onto nickel substrates at 100℃ without any postsynthesis annealing. Their structure and chemical composition were checked by
X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectrometry, cyclic voltammograms, and galvanostatic charge-discharge
pattern analysis. The prepared LiCoO₂ films show R3m crystallinity and preferred orientation of (101). the films grow layer by layer with
homogenous grains, whose diameters are about 0.3μm. The thin-film electrode displays a good cyclic character and its first discharge capacity is
143mAh/g. LiCoO₂ films made by soft solution processing can be used as cathode materials in lithium microbatteries.

Key words: lithium cobalt oxide, soft solution processing, thin-film electron