Effect of Rare Earth Oxides on Electrical Properties of SparkPlasma Sintered AlN Ceramics

doi:10.15541/jim20140428

Abstract

Abstract:

AlN ceramics doped with rare earth oxide (Sm₂O₃, Y₂O₃) were prepared by Spark Plasma Sintering (SPS) in nitrogen atmosphere using AlN powder as raw materials. The effect of rare earth oxide on the phase composition, microstructure and electrical resistivity of AlN ceramics were investigated. The results showed that those sintering additives promoted densification through liquid-phase sintering. AlN ceramics with electrical resistivity values of 1×10¹⁰-1×10¹²Ω•cm were obtained by precipitating rare earth aluminates as a conducting pathway at the grain boundaries. With the increasing of Sm₂O₃ doping, the phase of samarium aluminate gradually changed from Sm₄Al₂O₉ to SmAlO₃ which had a higher resistivity than Sm₄Al₂O₉. 3wt% Sm₂O₃ doped AlN ceramics had the minimum resistivity of 1.32×10¹⁰Ω•cm with the relative density of 99.33%. The yttrium aluminate phase gradually changed from Y₃Al₅O₁₂ to Y₄Al₂O₉ with the increase of Y₂O₃-doping. The electrical resistivity of different yttrium aluminates were about 1×10⁸Ω•cm. Y₂O₃- doped AlN sample with over 3wt% Y₂O₃ had an electrical resistivity about 1×10¹⁰Ω•cm. 4wt% Y₂O₃ doped AlN ceramic had the electrical resistivity of 1.60×10¹⁰Ω•cm with the maximum relative density of 99.08%.

Key words: AlN, Sm2O3, Y2O3, SPS, electrical properties

CLC Number:

TN304

HUANG Lin-Yun, LI Chen-Hui, KE Wen-Ming, SHI Yu-Sheng, HE Zhi-Yong, ZHANG Qi-Fu. Effect of Rare Earth Oxides on Electrical Properties of Spark
Plasma Sintered AlN Ceramics[J]. Journal of Inorganic Materials, 2015, 30(3): 267-271.

Figures/Tables 8

Fig. 1 XRD patterns of AlN ceramics containing different Sm2O3 mass fractions

Fig. 2 SEM images and EDS analyses of AlN with different Sm2O3 contents (a) 2wt%; (b) 3wt%; (c) 4wt%; (d) 5wt %; (e) 6wt%; (f) 10wt%

Fig. 3 Electrical resistivity and relative density of AlN ceramics containing different Sm2O3 mass fractions

Fig. 4 XRD patterns of sintering bodies with different mole ratios of Sm2O3 to Al2O3 a-Sm: Al=1: 1; b-Sm: Al=2: 1

Fig. 5 XRD patterns of AlN ceramics containing different Y2O3 mass fractions

Fig. 6 SEM images and EDS analyses of AlN with different Y2O3 contents (a) 1wt%; (b) 3wt%; (c) 5wt%; (d) 7wt%; (e) 10wt%; (f) 10wt%

Fig. 7 Electrical resistivity and relative density of AlN ceramics containing different Y2O3 mass fractions

Fig. 8 XRD patterns of sintering bodies with different moles ratio of Y2O3 to Al2O3 a-Y: Al=1: 1; b-Y: Al=3: 5; c-Y: Al=2: 1

References 11

[1]	YAN DONG-MING, GAO XIAO-JU, LIU GUO-XI, et al.Research progress of alumina nitride ceramics with high thermal conductivity. Bulletin of the Chinese Ceramic Society, 2011, 30(3): 602-607.
[2]	OMORI MAMORU.Sintering, consolidation, reaction and crystal growth by the spark plasma system(SPS).Mater. Sci. Eng. A, 2000, 287(2): 183-188.
[3]	WATARI K, HWANG H J, TORIYAMA M, et al.Effective sintering aids for low temperature sintering of AlN ceramics. J. Mater. Res., 1999, 14(4): 1409-1417.
[4]	DU XUE-LI, QIN MING-LI, FENG PEI-ZHONG, et al.Effects of Y2O3 on the SPS sintering nanometer AlN powers.Rare Metal Materials and Engineering, 2007, 36(3): 79-81.
[5]	HE XIU-LAN, YE FENG, ZHANG HAI-JIAO, et al.Study of rare-earth oxide sintering additive systems for spark plasma sintering AlN ceramics.Mater. Sci. Eng. A, 2010, 527(20): 5268-5272.
[6]	ZHANG ZHI-JUN, XU FU-MIN, TAN YI.Research progress in thermal conductivity and sintering additives of AlN packaging material.Materials Review, 2009, 23(9): 56-62.
[7]	HE XIU-LAN, YE FENG, ZHANG HAI-JIAO, et al.Effect of Sm2O3 content on microstructure and thermal conductivity of spark plasma sintered AlN ceramics.J. Alloys Compd., 2009, 482(1/2): 345-348.
[8]	KHOR K A, YU L G, MURAKOSHI Y.Spark plasma sintering of Sm2O3-doped aluminum nitride.J. Eur. Ceram. Soc., 2005, 25(7): 1057-1065.
[9]	LI M J, ZHANG M, SHEN Q, et al.Microstructure and properties of spark plasma sintered AlN ceramics. J. Mater. Sci., 2006, 41(23): 7934-7938.
[10]	ZHU JIANG, LI CHEN-HUI, LIU KAI, et al.Electrical properties of TiN/AlN composite ceramic.Semiconductor Technology, 2014, 39(3): 204-209.
[11]	KUSUNOSE T, SEKINO T, NIIHARA K.Production of a grain boundary phase as conducting pathway in insulating AlN ceramics.Acta Mater., 2007, 55(18): 6170-6175.

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