Structure and Properties of BST/BZT/BST Multilayer Film

doi:10.3724/SP.J.1077.2010.00247

Abstract

Abstract: Ba _0.6 Sr_0.4 TiO₃（BST） thin film, Ba(Zr _0.2 Ti _0.8 )O₃（BZT）thin film and Ba _0.6 Sr_0.4 TiO₃（BST）/Ba(Zr _0.2 Ti _0.8 )O₃（BZT）/Ba _0.6 Sr_0.4 TiO₃（BST） (BST/BZT/BST) multilayer thin film were prepared by pulsed laser deposition (PLD) on the LaNiO₃ (LNO) coated LaAlO₃ (LAO) substrate. All the three kinds of films were characterized by XRD and atomic force microscope (AFM). XRD tests reveal that highquality ［00l］oriented films are obtained.AFM results show that the grain size and root mean square (RMS) roughness of BST/BZT/BST sandwich film are similar to that of BST film and BZT film. Compared with BST and BZT film, the BST/BZT/BST film posses the highest figure of merit FOM (42.07), indicating the highly promising potential of BST/BZT/BST film for the application in tunable microwave device.

Key words: ^{BST/BZT/BST film,} thin films, dielectric constant, leakage current characteristics

CLC Number:

TN305

QIN Wen-Feng,XIONG Jie,LI Yan-Rong. Structure and Properties of BST/BZT/BST Multilayer Film[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2010.00247.

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