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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

类金刚石薄膜的表面纳米划擦性能评价

黄立业1,2; 徐可为1; 吕坚2   

  1. 1. 西安交通大学材料研究中心金属材料强度国家重点实验室, 西安710049; 2. 特鲁瓦技术大学机械系统并行工程实验室， 法国
  • 收稿日期:2000-10-09 修回日期:2000-11-15 出版日期:2001-09-20 网络出版日期:2001-09-20

Assessment of Nano-Scratch Resistance of Diamond-Like Carbon Films

HUANG Li-Ye1,2; XU Ke-Wei1; LU Jian2   

  1. 1. State-Key Laboratory for Mechanical Behavior of Materials; Research Center of Materials Science; Xi an Jiaotong University Xi an 710049; China; 2. LASMIS; Universitie de Technologie de Thoyes; France
  • Received:2000-10-09 Revised:2000-11-15 Published:2001-09-20 Online:2001-09-20

PDF (PC)

980

被引次数

66

摘要： 用射频等离子体增强化学气相沉积在钛合金表面制备了类金刚石薄膜，利用纳米压入仪及其附件研究了薄膜与纳米划擦有关的力学性能．结果表明：随薄膜厚度的增加，其硬度略有增加，但增幅较小，弹性模量没有明显的相应规律；薄膜在划擦过程中，随载荷增加，先后经历薄膜变形、薄膜与基体共同变形及薄膜剥离三个阶段；在薄膜变形阶段，划擦对薄膜的损害较小；当压头进入薄膜一定深度后，划擦后薄膜与基体的变形不同步，造成薄膜沿划痕向两边形成整齐排列的小裂纹，呈鱼骨状；达到临界载荷值时，薄膜在界面处发生脆性剥落；随膜厚增加，薄膜的临界载荷增大，因其残余应力的相应增大而发生大面积脆性剥落．

关键词: 类金刚石薄膜, 纳米压入, 纳米划痕, 生物材料

Abstract: Diamond-like carbon (DLC) films were prepared on Ti alloy substrate with an rf-plasma enhanced chemical vapor deposition method (rf PECVD), their nano-mechanical
properties were evaluated by using a Nano Indenter system with attachments of Continues Stiffness Measurement (CSM) and lateral force measurement (LFM).
The results show that the hardness of those films increases with film thickness, but their increment is small; during scratching, three processes containing fully
elastic recovery, asynchronous recovery of films and substrate, and delaminating of films, successively occur as the increase of load; at the first regime, no
damage could be found on the surface of films, in the second regime, the trace like fish bone formed; as the thickness of films increases, the critical load increases,
but the delamination of films is more severe, which may be attributed to the increase of internal stress in the films.

Key words: diamond-like carbon, nanoindentation, nanoscratch, biomaterials

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