柔性压电器件及其可穿戴应用

doi:10.15541/jim20220549

无机材料学报 ›› 2023, Vol. 38 ›› Issue (7): 717-730.DOI: 10.15541/jim20220549 CSTR: 32189.14.10.15541/jim20220549

所属专题：【信息功能】敏感陶瓷（202409）；【信息功能】介电、铁电、压电材料（202409）；【信息功能】柔性材料(202409)

• 综述 • 下一篇

柔性压电器件及其可穿戴应用

冒爱琴¹(), 陆文宇¹, 贾洋刚¹, 王冉冉²^,³(), 孙静²

1.安徽工业大学材料科学与工程学院, 马鞍山 243032
2.中国科学院上海硅酸盐研究所, 高性能陶瓷和超微结构国家重点实验室, 上海 200050
3.中国科学院大学杭州高等研究院, 化学与材料科学学院, 杭州 310024

收稿日期:2022-09-19 修回日期:2022-11-02 出版日期:2023-01-20 网络出版日期:2023-01-20
通讯作者: 王冉冉, 研究员. E-mail: wangranran@mail.sic.ac.cn
作者简介:冒爱琴(1978-), 女, 副教授. E-mail: maoaiqin@ahut.edu.cn
基金资助:
中国科学院中奥国际合作项目(GJHZ2046)

Flexible Piezoelectric Devices and Their Wearable Applications

MAO Aiqin¹(), LU Wenyu¹, JIA Yanggang¹, WANG Ranran²^,³(), SUN Jing²

1. School of Materials Science and Engineering, Anhui University of Technology, Maanshan 243032, China
2. The State Key Lab of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
3. School of Chemistry and Materials Science, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China

Received:2022-09-19 Revised:2022-11-02 Published:2023-01-20 Online:2023-01-20
Contact: WANG Ranran, professor. E-mail: wangranran@mail.sic.ac.cn
About author:MAO Aiqin(1978-), female, associate professor. E-mail: maoaiqin@ahut.edu.cn
Supported by:
Cooperative R&D Projects between Austria, FFG and China, CAS(GJHZ2046)

摘要/Abstract

摘要：

可穿戴设备是能穿在身上, 实时获取人体或环境信息并进行传递和处理的功能设备, 在医疗健康、人工智能、运动娱乐等领域具有广阔的应用前景。随着可穿戴设备的发展, 各类柔性传感器应运而生。基于压电效应的柔性力学传感器因具有感应频率宽、响应快、线性好、自供电等优势而备受关注。然而传统的压电材料多为脆性陶瓷和晶体材料, 限制了其在柔性方面的应用。随着研究的深入, 越来越多的柔性压电材料和压电复合材料不断涌现, 给柔性可穿戴力学器件注入了新的发展活力。本文主要概括了柔性可穿戴压电器件的前沿进展, 包括压电原理、柔性压电材料的制备与性能提升方法。此外, 还详细总结了柔性可穿戴压电设备的主要应用方向, 包括医疗健康和人机交互, 以及遇到的挑战与机遇。

关键词: 力学传感器, 可穿戴器件, 压电效应, 制备方法, 柔性

Abstract:

Wearable instruments are functional devices that can be worn on human body, sensing, transmitting and processing body or environmental information in real time, and show broad application prospects in medical health, especially artificial intelligence, sports and entertainment. With the development of wearable instruments, various flexible sensors have emerged. Flexible mechanical sensors based on piezoelectric effect have attracted much attention because of their advantages of wide sensing frequency, fast response, good linearity, and self-power supply. However, traditional piezoelectric materials are mostly brittle ceramics and crystalline materials, which limit their application in flexible devices. With the deepening of research, more and more flexible piezoelectric materials and piezoelectric composites continue to emerge, injecting new development vitality into flexible wearable mechanical devices. This article mainly summarizes the cutting-edge progress of flexible wearable piezoelectric devices, including piezoelectric principle, preparation and performance improvement methods of flexible piezoelectric materials. In addition, the main application directions of flexible wearable piezoelectric devices, including medical health and human-computer interaction, as well as the challenges and opportunities encountered, are summarized.

Key words: mechanical sensor, wearable device, piezoelectric effect, preparation method, flexibility

中图分类号:

TB381

冒爱琴, 陆文宇, 贾洋刚, 王冉冉, 孙静. 柔性压电器件及其可穿戴应用[J]. 无机材料学报, 2023, 38(7): 717-730.

MAO Aiqin, LU Wenyu, JIA Yanggang, WANG Ranran, SUN Jing. Flexible Piezoelectric Devices and Their Wearable Applications[J]. Journal of Inorganic Materials, 2023, 38(7): 717-730.

图/表 7

图1 柔性压电器件的材料及其制备与应用

Fig. 1 Materials and their preparation and application for flexible piezoelectric devices

图2 压电基础原理[1-2,10,13⇓-15]

Fig. 2 Fundamental principles of piezoelectric effect[1-2,10,13⇓-15] (a) Schematic diagram of piezoelectric effect[1]; (b) Structure and piezoelectric effect of BTO[2]; (c) Structure and piezoelectric effect of ZnO[10]; (d) Structure and piezoelectric effect of monolayer MoS2[13]; (e) Different crystalline phase structures of PVDF[14]; (f) Structure and piezoelectric effect of chitin[15]

图3 制备方法与表面改性[57⇓⇓⇓⇓-62]

Fig. 3 Preparation methods and surface modification[57⇓⇓⇓⇓-62] (a) Schematic diagram of electrospinning[57]; (b) Electrospun PVDF fibers with different morphologies[58]; (c) Schematic diagram of the preparation of thin films by LB method[59]; (d) PDA-coated BTO[60]; (e) Ag-decorated BTO[61]; (f) Carbon-coated BTO[62]

图4 化学掺杂与结构改善[84-85,87 -88]

Fig. 4 Chemical doping and structural improvement[84-85,87 -88] (a) Tb-doped ZnO[84]; (b) Output of modified ZnO with different concentrations[84]; (c) Effect of doping with different halogen elements on ZnO[85]; (d) Effect of doping with different halogen elements on the piezoelectric output of ZnO[85]; (e) Schematic diagram of the GAMF device[87]; (f) Piezoelectric active layers with different structures[88] (1 kgf=9.8 N)

图5 可穿戴器件的生理监测应用[45,89]

Fig. 5 Physiological monitoring applications of flexible wearable devices[45,89] (a) Principle of blood pressure monitoring with dual-sensor[89]; (b) Principle of blood pressure monitoring with single-sensor[89]; (c) Schematic diagram of interlocking ZnO NRs[45]; (d) Interlocking ZnO structure for monitoring breathing, heartbeat and leg muscle movement[45]

图6 可穿戴器件的伤口愈合与植入式应用[90⇓⇓-93]

Fig. 6 Flexible wearable devices for wound healing and implantable applications[90⇓⇓-93] (a) PVDF device for promoting wound healing[90]; (b) PVDF device with composite electrodes for wound healing and nerve cell restored[91]; (c) Ultraflexible piezoelectric energy harvesting and sensing integrated devices[92]; (d) Schematic diagram of implantable ultrasonic piezoelectric device[93]; (e) Analgesic effects of wireless ultrasound-driven implantable devices

图7 柔性可穿戴器件的人机交互[94⇓⇓-97]

Fig. 7 Flexible wearable devices for human-computer interaction[94⇓⇓-97] (a) Intelligent piezoelectric tactile sensor[94]; (b) Visualized force glove and its structure[95]; (c) Wireless controlled manipulator[96]; (d) Gesture recognition glove[97]

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柔性压电器件及其可穿戴应用

Flexible Piezoelectric Devices and Their Wearable Applications

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