Abstract: The preparation of the micro/nano-stuctured surfaces is important for wetting study of material surfaces and application of biomaterials, in order to obtain super-hydrophobility or meet well the requirement
of the biological environments. In the present work, preparation of micron and sub-micron/nano-scale structured surfaces was studied. Micro-scale square or round structures on the surfaces were prepared
by photo-lithography; the distorted square or round structures such as tower-shape and disc-shape structures were imprinted by soft-lithography; the sub-micron/nano-scale net structured surfaces were
prepared by using self-assembled silica colloidal crystals as the template and infiltration of polystyrene-toluene solution in the crystals. The surface features of the samples were investigated by optical and scanning electron microscopy (SEM).

Key words: surface, micro/nano-structure, photo-lithography, soft-lithography, silica sphere, template