Pulsed-laser-arc Deposition of Diamond Like Carbon Films

Journal of Inorganic Materials

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Pulsed-laser-arc Deposition of Diamond Like Carbon Films

JIANG Na-Na, SHAO Tian-Min, CHEN Da-Rong

State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China

Received:2004-01-12 Revised:2004-04-19 Published:2005-01-20 Online:2005-01-20

Abstract

Abstract: Pulsed-laser-arc deposition technique was introduced. Diamond like carbon (DLC) films were deposited on Si<111> and Si<100> respectively. Results of laser
raman spectroscopy showed that the as-deposit films were amorphous, having obvious sp³ structure. Meanwhile, surface topography and micro-tribological
character were investigated by using atomic force microscope and nano-scratch tester. The results show that the surface microstructure and micro-tribological
character of the film deposited on Si<100> is better than that deposited on Si<111>. The average friction coefficient of the film on Si<100> is 0.036.

Key words: pulsed-laser-arc, diamond like carbon film, laser raman spectroscopy, friction coefficient

CLC Number:

O484

JIANG Na-Na,SHAO Tian-Min,CHEN Da-Rong. Pulsed-laser-arc Deposition of Diamond Like Carbon Films[J]. Journal of Inorganic Materials.

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Pulsed-laser-arc Deposition of Diamond Like Carbon Films

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