Nucleation and Growth of CVD Diamond Films on Smooth SiSubstrate Pretreated by Nanodiamond Powders

Abstract

Abstract: Ultradispersed nanodiamond powder synthesized by explosive detonation was used for the pretreatment of mirror Si substrate for nucleation and growth of diamond by microwave plasma-CVD. Compared with the scratching pretreatment,
it is found that the pretreatment method by coating substrate with the slurry loading nanodiamond powder not only enhances both of density (up to 10⁹ cm^-2
and nucleation rate, improving the quality of grown-up film greatly, but also controls nucleation easily. In addition, this pretreatment is also very
cost-effective, non-damaging, and reproducible as well.

Key words: CVD diamond，nucleation，pretreatment of substrate，nanodiamond powder

CLC Number:

O484

SHAO Le-Xi,XIE Er-Qing,HE De-Yan,CHEN Guang-Hua,XU Kang. Nucleation and Growth of CVD Diamond Films on Smooth SiSubstrate Pretreated by Nanodiamond Powders[J]. Journal of Inorganic Materials.

[1]	SHEN Bin, ZHANG Xu, XIONG Huai, LI Haiyuan, XIE Xinglong. Preparation and Optical Properties of Sol-Gel SiO₂ Antireflective Films [J]. Journal of Inorganic Materials, 2024, 39(5): 525-530.
[2]	YANG Zhiliang, YANG Ao, LIU Peng, CHEN Liangxian, AN Kang, WEI Junjun, LIU Jinlong, WU Lishu, LI Chengming. Preparation of 3-inch Diamond Film on Silicon Substrate for Thermal Management [J]. Journal of Inorganic Materials, 2024, 39(3): 283-290.
[3]	CHAN Siyi, TU Juping, HUANG Ke, SHAO Siwu, YANG Zhiliang, LIU Peng, LIU Jinlong, CHEN Liangxian, WEI Junjun, AN Kang, ZHENG Yuting, LI Chengming. Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film [J]. Journal of Inorganic Materials, 2023, 38(12): 1413-1419.
[4]	LIN Junliang, WANG Zhanjie. Research Progress on Ferroelectric Superlattices [J]. Journal of Inorganic Materials, 2023, 38(6): 606-618.
[5]	ZHONG Xiaolan, LIU Xueqing, DIAO Xungang. Electrochromic Devices Based on Tungsten Oxide and Nickel Oxide: a Review [J]. Journal of Inorganic Materials, 2021, 36(2): 128-139.
[6]	SUN Ding, DING Yanyan, KONG Lingwei, ZHANG Yuhong, GUO Xiujuan, WEI Liming, ZHANG Li, ZHANG Lixin. First-principles Study on Mg Doping in Cu₂ZnSnS₄ [J]. Journal of Inorganic Materials, 2020, 35(11): 1290-1294.
[7]	XIAO Min, SUN Rui-Zhi, LI Yan-Fang, KANG Tong-Tong, QIN Jun, YANG Run, BI Lei. Transfer Printing of VO₂Thin Films Using MoS₂/SiO₂ van der Waals Heterojunctions [J]. Journal of Inorganic Materials, 2019, 34(11): 1161-1166.
[8]	ZHANG Cong, KANG Chao-Yang, ZONG Hai-Tao, LI Ming, LIANG Shan-Shan, CAO Guo-Hua. Stress Induced Modulation of the Structure and Photoelectric Property of Vanadium Oxide Films on Sapphire Substrate [J]. Journal of Inorganic Materials, 2018, 33(11): 1225-1231.
[9]	ZHAO Hui-Yue, WANG Xiao-Dong, FENG Jian-Bin, LIU Yuan, HUANG Ji-Chen, SHEN Jun. Environmental Stable SiO₂Antireflective Coating Modified via NH₃/HTMS Vapor Phase Treatment [J]. Journal of Inorganic Materials, 2018, 33(11): 1219-1224.
[10]	SONG Jian-Min, DAI Xiu-Hong, LIANG Jie-Tong, ZHAO Lei, ZHOU Yang, GE Da-Yong, MENG Xu-Dong, LIU Bao-Ting. Resistive Switching Effect and Dielectric Property of Epitaxial BiFeO₃ Thin Films by Off-axis Magnetron Sputtering [J]. Journal of Inorganic Materials, 2018, 33(9): 1017-1021.
[11]	FU Chao-Li, YANG Yong, MA Yun-Feng, WEI Yu-Quan, JIAO Zheng, HUANG Zheng-Ren. APS Bias Voltage on Properties of HfO₂ Laser Films Deposited by Reactive Plasma Ion Assisted Electron Evaporation [J]. Journal of Inorganic Materials, 2017, 32(1): 69-74.
[12]	NIU Yan-Yan, WANG Xiao-Dong, YAO Lan-Fang, TIAN Bing-Tao, FENG Jian-Bin, CAO Yuan-Yuan, ZHANG Qing-Hua, SHEN Jun. Preparation of Octyltrimethoxysilane Modified SiO₂ Hydrophobic Antireflective Coating [J]. Journal of Inorganic Materials, 2016, 31(5): 499-504.
[13]	ZHANG Zhi-Ping, LIU Hong-Fei, PAN Kun-Min, CHEN Xiao-Bing, ZENG Xiang-Hua. Synthesis of Negative Thermal Expansion Sc₂W₃O₁₂ Thin Film [J]. Journal of Inorganic Materials, 2015, 30(12): 1278-1282.
[14]	CHEN Xiao-Bo, YANG Wen, DUAN Liang-Fei, ZHANG Li-Yuan, YANG Pei-Zhi. Microstructure and Luminous Property of Periodical Gradient Si-rich SiN_x Thin Films [J]. Journal of Inorganic Materials, 2014, 29(12): 1270-1274.
[15]	JIANG Jin-Long, WANG Qiong, HUANG Hao, ZHANG Xia, WANG Yu-Bao, GENG Qing-Fen. Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films [J]. Journal of Inorganic Materials, 2014, 29(9): 941-946.

Nucleation and Growth of CVD Diamond Films on Smooth SiSubstrate Pretreated by Nanodiamond Powders

PDF (PC)

Knowledge

Cited

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments