Microstructures and Superhardness Effects of NbN/TaN Nano-multilayer Films

Abstract

Abstract: The polycrystalline NbN/TaN nano-multilayer films were grown on the substrates of stainless steel
by reactive magnetron sputtering. The microstructures and microhardness of the nano-multilayer films were studied by X-ray diffraction (XRD),
transmission electron microscopy (TEM) and microhardness tester. The results show that the NbN layers are cubic crystal structure and TaN layers are
hexagonal in the NbN/TaN multilayer films. NbN/TaN nano-multilayer films have superhardness effects with a modulation period from 2.3nm to 17.0nm.
The maximum hardness HK is 51.0GPa.

Key words: NbN/TaN nano-multilayer films, microstructures, superhardness effects

CLC Number:

O484

XU Jun-Hua,LI Ge-Yang,GU Ming-Yuan. Microstructures and Superhardness Effects of NbN/TaN Nano-multilayer Films[J]. Journal of Inorganic Materials.

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Microstructures and Superhardness Effects of NbN/TaN Nano-multilayer Films

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