Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films

doi:10.15541/jim20130635

Abstract

Abstract:

Titanium/silicon co-doped diamond-like carbon films were deposited on Si substrate by middle frequency magnetron sputtering using Ti80Si20 composite as target. The microstructure of the deposited films was characterized by ultraviolet and visible multi-wavelength Raman spectroscope. The influence of ultraviolet light irradiation on microstructure of the films was investigated by a combination of Raman and FTIR spectroscope. The mechanism of microstructural evolution of the films induced by ultraviolet light irradiation was discussed. The results show that the film dominated by amorphous structure displays inclusions of trans-polyacetylene, p-phenylene vinylene and sp hybridized carbine carbon chains. Ultraviolet light irradiation induces the relaxation and reconstruction of microstructure in the films, which leads to the increase of Si-O and C-O bonding, and the decrease of C=C and C-H bonding. Meanwhile, the size of sp² clusters in the films decreases and the degree of disorder of sp² clusters increases.

Key words: diamond-like carbon film, ultraviolet light irradiation, Raman spectra, FTIR spectra, microstructural evolution

CLC Number:

TB303
O484

JIANG Jin-Long, WANG Qiong, HUANG Hao, ZHANG Xia, WANG Yu-Bao, GENG Qing-Fen. Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films[J]. Journal of Inorganic Materials, 2014, 29(9): 941-946.

Figures/Tables 7

Fig. 1 Raman spectra of the film at different excitation wavelengths

Fig. 2 HRTEM image of the film

Fig. 3 Fitting Raman peak position of the film as a function of excitation wavelength (a) G peak; (b) T2, D and P peaks

Fig. 4 Raman spectrum of the film in the low wavenumber range

Fig. 5 Raman spectra of the film after ultraviolet light irradiation for (a) 6 h and (b) 12 h

Table 1 Fitting results of Raman spectra of the film before and after ultraviolet light irradiation

Radiation time/h	G /cm^-1	T₁ /cm^-1	T₂ /cm^-1	P /cm^-1	I(D)/I(G)	FWHM(G)/cm^-1	Disp(G)/(cm^-1•nm^-1)
0	1561.4	1045.9	1472.0	1184.7	0.84	137.5	0.59
6	1555.3	1056.5	1474.8	1187.7	0.88	151.7	0.72
12	1555.0	1059.3	1474.0	1193.7	0.77	153.0	0.72

Fig. 6 FTIR spectra (a) and magnified high wavenumber region from 2700 to 3400 cm-1 in the FTIR spectra (b) of the film

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