Abstract: A new kind of b-axis oriented BaTi₂O₅ thin film was prepared on MgO (100) substrates by pulsed laser deposition. The effects of substrate temperature (T _sub) and oxygen partial pressure (P _O2) on the crystal phase and preferred orientation were investigated. The BaTi₂O₅ thin films exhibits (710) or (020) orientation, which depends on the substrate temperature and oxygen partial pressure. On the deposition condition of T _sub=700℃ and P _O2=12.5Pa, the b-axis oriented BaTi₂O₅ film is successfully obtained. The film has a dense and smooth surface, showing an elongated granular texture.

Key words: BaTi₂O₅ thin film, b-axis orientation, substrate temperature, oxygen partial pressure