Deposition Temperature and Heat Treatment on Silicon Nitride Coating Deposited by LPCVD
LIAO Chun-Jing, DONG Shao-Ming, JIN Xi-Hai, HU Jian-Bao, ZHANG Xiang-Yu, WU Hui-Xia
Journal of Inorganic Materials . 2019, (11): 1231 -1237 .  DOI: 10.15541/jim20190035