不同厚度二维VN插入层对TiSiN纳米复合膜微观结构和力学性能的影响

doi:10.15541/jim20140022

无机材料学报 ›› 2014, Vol. 29 ›› Issue (10): 1082-1086.DOI: 10.15541/jim20140022 CSTR: 32189.14.10.15541/jim20140022

不同厚度二维VN插入层对TiSiN纳米复合膜微观结构和力学性能的影响

薛增辉¹, 李伟², 刘平², 马凤仓², 刘新宽², 陈小红², 何代华²

(上海理工大学 1. 机械工程学院； 2. 材料科学与工程学院, 上海 200093)

收稿日期:2014-01-08 修回日期:2014-04-02 出版日期:2014-10-20 网络出版日期:2014-09-22
作者简介:薛增辉(1989–), 男，硕士研究生. E-mail: xin0413zi@163.com
基金资助:
国家自然科学基金(51101101);上海市自然科学基金(11ZR1424600);上海市研究生创新基金(JWCXSL1302)

Influence of VN 2-D Inserted Layers Thickness on Microstructure and Mechanical Property of TiSiN Nanocomposite Film

XUE Zeng-Hui¹, LI Wei², LIU Ping², MA Feng-Cang², LIU Xin-Kuan², CHEN Xiao-Hong², HE Dai-Hua²

(1. School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093,China; 2. School of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China)

Received:2014-01-08 Revised:2014-04-02 Published:2014-10-20 Online:2014-09-22
About author:XUE Zeng-Hui. E-mail: xin0413zi@163.com
Supported by:
National Natural Science Foundation of China Program (51101101);National Natural Science Foundation of Shanghai, China (11ZR1424600);The Innovation Fund Project for Graduate Student of Shanghai (JWCXSL1302)

摘要/Abstract

摘要：

采用TiSi复合靶与V靶, 用射频磁控溅射工艺在TiSiN纳米复合膜中插入不同厚度的VN纳米层, 采用X射线衍射仪(XRD)、高分辨透射电子显微镜(HRTEM)和纳米压痕仪研究了VN插入层厚度对TiSiN纳米复合膜的微观结构和力学性能的影响。结果表明: 当TiSiN纳米复合膜中插入VN纳米层厚度较小时, 薄膜由纳米复合结构转变成纳米多层结构, 薄膜硬度降低。继续增加VN层厚度, 薄膜硬度随之升高, 在VN沉积层厚为0.5 nm时薄膜出现连续贯穿多层纳米层、结晶度良好的柱状晶, TiSiN层与VN层呈共格外延生长的结构, 薄膜硬度达到37.2 GPa。随着VN层厚的继续增加, 薄膜的共格外延生长结构消失, 硬度下降。

关键词: TiSiN纳米复合膜, VN插入层, 微观结构, 力学性能

Abstract:

Using V and TiSi targets, a series of TiSiN nanocomposite films being inserted by VN nano-layers with different thickness were prepared by RF magnetron sputtering method. Using X-ray diffraction (XRD), high resolution transmission electron microscope (HRTEM) and nano-indentation techniques, the influences of VN inserted layer thickness on microstructure and mechanical property of TiSiN nanocomposite film were investigated. The results show that, when the VN inserted layer thickness is small, the TiSiN film transforms from nanocomposite structure into nanomultilayered structure, leading to the decrease of hardness. As the VN inserted layers thicken, the hardness of film renewedly increases. When the VN inserted thickness is 0.5 nm, the film presents columnar crystals which continuously crosses through the nanomultilayers. TiSiN and VN layers exhibit coherent epitaxial growth structure, and the hardness accordingly reaches 37.2 GPa. With further increase of the VN inserted layer thickness, the coherent epitaxial growth structure is broken and the hardness of film decreases.

Key words: TiSiN nanocomposite films, VN inserted layers, microstructure, mechanical property

中图分类号:

TG174

薛增辉, 李伟, 刘平, 马凤仓, 刘新宽, 陈小红, 何代华. 不同厚度二维VN插入层对TiSiN纳米复合膜微观结构和力学性能的影响[J]. 无机材料学报, 2014, 29(10): 1082-1086.

XUE Zeng-Hui, LI Wei, LIU Ping, MA Feng-Cang, LIU Xin-Kuan, CHEN Xiao-Hong, HE Dai-Hua. Influence of VN 2-D Inserted Layers Thickness on Microstructure and Mechanical Property of TiSiN Nanocomposite Film[J]. Journal of Inorganic Materials, 2014, 29(10): 1082-1086.

图/表 5

图1 不同VN插入层厚度的TiSiN纳米复合膜的XRD图谱

Fig. 1 XRD patterns of TiSiN nanocomposite films inserted by VN layers with different thicknesses

图2 不同VN插入层厚度的TiSiN纳米复合膜的低角度XRD图谱

Fig. 2 Low-angle XRD patterns of TiSiN nanocomposite films inserted by VN layers with different thicknesses

图3 相同工艺条件下制备的未插入VN层的TiSiN纳米复合膜和插入VN层厚度为0.5 nm的TiSiN纳米复合膜的横截面HRTEM照片

Fig. 3 Cross-sectional HRTEM images of TiSiN nanocomposite films inserted by VN layers with different thicknesses (a) Without VN inserted layers; (b) VN layer thickness of 0.5 nm (low-magnification); (c) VN layer thickness of 0.5 nm (high-magnification); (d) SAED patterns (VN layer thickness of 0.5nm)

图4 VN纳米插入层厚对TiSiN纳米复合膜硬度的影响

Fig. 4 Variation of the hardness of TiSiN nanocomposite film with VN layer thickness

图5 插入不同厚度VN的TiSiN纳米复合膜微观结构演变示意图

Fig. 5 Microstructural evolution of TiSiN nanocomposite films inserted by VN layers with different thicknesses (a) Without VN inserted layers; (b) VN deposited thickness of 0.5 nm; (c) VN deposited thickness of 0.9 nm

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不同厚度二维VN插入层对TiSiN纳米复合膜微观结构和力学性能的影响

Influence of VN 2-D Inserted Layers Thickness on Microstructure and Mechanical Property of TiSiN Nanocomposite Film

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