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无机材料学报

无机材料学报

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溶胶-凝胶法制备BaxSr1-xTiO3铁电薄膜的研究

王静1,2; 兰艳梅2; 王伟1; 杨彩琴1; 刘明登2   

  1. 1. 河北医科大学药学院， 石家庄 050017; 2。 广西师范大学化学系， 桂林 541004
  • 收稿日期:2000-11-29 修回日期:2001-01-15 出版日期:2001-11-20 网络出版日期:2001-11-20

Study On BaxSr1-xTiO3 Ferroelectric Thin Film Prepared by Sol-Gel Methods

WANG-Jing1,2; LAN Yan-Mei2; WANG Wei1; YANG Cai-Qin1; LIU Ming-Deng2   

  1. 1. Pharmaceutical College; Hebei Medical University Shijiazhuang 050017; China; 2. Chemical Depart- ment; Gunagxi Normal University Guilin 541004; China
  • Received:2000-11-29 Revised:2001-01-15 Published:2001-11-20 Online:2001-11-20

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摘要： 介绍了Ｓｏｌ－ｇｅｌ法制备ＢａｘＳｒ1－ｘＴｉＯ３铁电薄膜的工艺参数．在溶胶中加入一定体积百分含量的干燥化学控制添加剂（ＤＣＣＡ）可有效的防止薄膜开裂．通过ＩＲ、ＸＲＤ谱图、Ｃ－Ｖ回线、Ｉ-Ｖ曲线等测试方法比较了金属醇盐法和以部分醋酸盐代替醇盐法制备薄膜的微观结构和性能．实验结果表明；全部采用醇盐为原料制备的ＢＳＴ薄膜性能较好．通过两种方法制备ＢＳＴ薄膜性能的差异，本文提出了这两种方法的成膜机理．

关键词: 溶胶-凝胶法, BaxSr1-xTiO3, 铁电薄膜

Abstract: The preparation of BaxSr1-xTiO3(BST) ferroelectric thin films was studied. A dry chemical control additive(DCCA) was added to the sol in order to avoid producing cracks. Metal- alkoxide and partial acetate methods influencing on the quality of BST thin film were also studied. The grain size, microstructure and electric properties of the films were characterized by XRD spectra, C - V characteristic, IR spectra, I - V curve, etc. The results indicate that the quality of the material synthesised by the metal-alkoxide method is better.

Key words: sol-gel, barium stronium titanate, ferroelectric thin-film