无机材料学报

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退火对有序孔洞氧化铝膜荧光性能的影响

陈俊; 蔡维理; 牟季美   

  1. 中国科学技术大学材料科学与工程系, 合肥 230026
  • 收稿日期:2000-06-12 修回日期:2000-07-10 出版日期:2001-07-20 网络出版日期:2001-07-20

Annealing Effect on Photoluminescence of Alumina Membranes with Ordered Pore Arrays

CHEN Jun; CAI Wei-Li; MOU Ji-Mei   

  1. Department of Materials Science & Engineering; University of Science & Technology of China; Hefei 230026; China
  • Received:2000-06-12 Revised:2000-07-10 Published:2001-07-20 Online:2001-07-20

摘要: 用阳极氧化法在草酸溶液或硫酸溶液中制备了有序阵列孔洞的氧化铝膜.研究了在不同温度下、不同气氛中退火对多孔氧化铝膜荧光性能的影响.结果表明,随着退火温度的升高,发光带的强度也随之增强;与此同时,发光带的峰位出现蓝移.当退火温度=500℃时,在草酸中制备的氧化铝膜的发光强度最强;而在硫酸中制备的膜,其发光最强的退火温度为400℃.当 ≤400℃时,氧化铝膜的发光强度基本上与退火气氛无关;当 =500℃时,在草酸中制备的膜在空气中退火后的发光强度高于在真空中退火后的发光强度.在草酸中制备的氧化铝膜的发光带明显比在硫酸中制备的膜强得多.电子自旋共振的实验结果表明,蓝光发光带来自多孔氧化铝膜中的心.我们还对多孔氧化铝膜发光特性的机制进行探讨.

关键词: 阳极氧化, 氧化铝膜, 光致发光

Abstract: Alumina membranes with ordered pore arrays were prepared via anodization in an oxalic or sulfuric acid.
Photoluminescence behavior of porous alumina membranes was studied by annealing the membranes in air or in vacuum of about 1×10-3Pa
at different temperatures. The results show that the intensity of the photoluminescence (PL) band increases with the annealing temperature and
the PL band exhibits a blue shift at the same time. The intensity of the PL band reaches its maximum for anodic alumina membranes prepared in oxalic
acid when the annealing temperature Ta=500℃. While for membranes prepared in sulfuric acid, the maximum PL intensity appears at
Ta=400℃. When Ta≤400℃, the PL intensities are almost independent of the annealing atmosphere; while the PL intensity of the membrane prepared in the oxalic acid after annealed in
air is higher than that annealed in vacuum when Ta=500℃. The intensity of the PL band is much higher for alumina membranes prepared
in oxalic acid than that prepared in sulfuric acid. Electron spin resonance results verify that the blue PL band comes from the F+ centers in porous
alumina membranes. Mechanisms of the photoluminescence characterization of porous alumina membranes were discussed.

Key words: anodization, alumina membranes, photoluminescence

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