无机材料学报

• 研究论文 • 上一篇    下一篇

疏水疏油二氧化硅增透膜的制备

晏良宏1,2, 匙芳廷1,2, 蒋晓东2, 吕海兵2, 袁晓东2, 江波1   

  1. (1. 四川大学化学学院, 成都 614004; 2. 中国工程物理研究院激光聚变研究中心, 绵阳 621900)
  • 收稿日期:2006-11-27 修回日期:2007-03-22 出版日期:2007-11-20 网络出版日期:2007-11-20

Preparation of Hydro-oleophobic Silica Antireflective Coating

YAN Liang-Hong1,2, CHI Fang-Ting1,2, JIANG Xiao-Dong2, LU Hai-Bing2, YUAN Xiao-Dong2, JIANG Bo1   

  1. (1. College of Chemistry, Sichuan University, Chengdu 614004, China; 2. Research Center of Laser Fusion, China Academy of Engineering Physical, Mianyang 621900, China)
  • Received:2006-11-27 Revised:2007-03-22 Published:2007-11-20 Online:2007-11-20

摘要: 以正硅酸乙酯为前驱体,氨水为催化剂,采用溶胶-凝胶法,结合全氟辛基癸烷三甲氧基硅烷(FAS)自组装对膜层表面改性,制备了疏水疏油二氧化硅增透膜. 采用红外光谱仪, 分光光度计, 扫描探针显微镜, 椭偏仪, 静滴接触角测量仪, 抗油污染能力测试等技术对膜层性质进行了分析. 结果表明: 疏水疏油增透膜的峰值透光率为99.8%; 与水的接触角为118.0°, 与二甲基硅油的接触角达到74.5°; 在抗油污染能力测试中, 疏水疏油增透膜的抗油污染能力较常规增透膜大大增强.

关键词: 溶胶-凝胶, 二氧化硅, 增透膜, 疏水疏油性

Abstract: Using tetraethoxylsilane as precursor, ammonia as catalyst, the hydro-oleophobic antireflective coating was prepared by sol-gel process along with fluoroalkylsilane self-assembly. The properties of the coatings were characterized with spectrophotometer, scanning probe microscope, spectroscopic ellipsometry, contact angle measurement and oil-resistant test. The results indicate that the peak transmittance of the hydro-oleophobic coatings is 99.8%, water contact angle is 118.0°, and polydimethyl siloxane oil angle is 74.5°. The oil-resistant test shows that the oil-resistant ability of the hydro-oleophobic silica antireflective coating is considerably improved compared with that of the common silica antireflective coating.

Key words: sol-gel, silica, antireflective coating, hydro-oleophobicity

中图分类号: