Journal of Inorganic Materials

• Research Paper • Previous Articles     Next Articles

Micro-mechanical Properties and Micro-structure of Ar+ Ion Implanted Single-crystal Silicon

SUN Rong1,2; XU Tao1; KOU Guan-Tao1; XUE Qun-Ji1   

  1. 1.State Key Laboratory of Lubrications; Lanzou Institute of Chemical Physics; Chinese Academy of Sciences; Lanzhou 730000; China; 2.Special Functional Materials Key Laboratory; Henan University; Kaifeng 475001; China
  • Received:2004-03-31 Revised:2004-05-26 Published:2005-05-20 Online:2005-05-20

Abstract: The nano-scratch behaviors of Ar+ implanted single-crystal silicon were investigated by a nano indenter system, the micro-structure of the implanted layer was analyzed with TEM. The results show that Ar+ implantation of single-crystal silicon increases the critical load, the best dose is 1×1016ions/cm2. The mixed structure of micro-crystal and amorphous silicon is formed on the surface of Ar+ implanted single-crystal silicon. This contributes to increasing the ability of plastic deformation and to increasing the fracture toughness of single-crystal silicon.

Key words: single-crystal silicon, Ar+ implantation, nano-scratch, fracture toughness

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