Micro-mechanical Properties and Micro-structure of Ar+ Ion Implanted Single-crystal Silicon

Abstract

Abstract: The nano-scratch behaviors of Ar⁺ implanted single-crystal silicon were investigated by a nano indenter system, the micro-structure of the implanted layer was analyzed with TEM. The results show that Ar+ implantation of single-crystal silicon increases the critical load, the best dose is 1×10¹⁶ions/cm². The mixed structure of micro-crystal and amorphous silicon is formed on the surface of Ar⁺ implanted single-crystal silicon. This contributes to increasing the ability of plastic deformation and to increasing the fracture toughness of single-crystal silicon.

Key words: single-crystal silicon, Ar+ implantation, nano-scratch, fracture toughness

CLC Number:

TQ174

SUN Rong,XU Tao,KOU Guan-Tao,XUE Qun-Ji. Micro-mechanical Properties and Micro-structure of Ar⁺ Ion Implanted Single-crystal Silicon[J]. Journal of Inorganic Materials.

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Micro-mechanical Properties and Micro-structure of Ar⁺ Ion Implanted Single-crystal Silicon

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