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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Micro-mechanical Properties and Micro-structure of Ar
+
Ion Implanted Single-crystal Silicon
SUN Rong,XU Tao,KOU Guan-Tao,XUE Qun-Ji
Journal of Inorganic Materials . 2005, (
3
): 759 -763 .
