Abstract: We successfully prepared high quality Li-doped ZnO ceramic targets with 70mm in diameter and 10～15mm in depth by solid-state reactions. The paper studied the influence of different concentration of Li₂CO₃ on the electrical properties of ZnO ceramic target. By comparing and analyzing the IR( insulative resistivity ) and tgδ(dielectric loss), the optimum concentration of Li₂CO₃ doped in ZnO ceramic target was obtained(2.2%mol ratio). And the optimum process for preparing ZnO-Li_2.2% ceramic target was also realized through the investigation of physics and electrics of ZnO ceramic under the different sintering temperatures and molding pressure treatments. By using Li_2.2%-doped ZnO ceramic as the target, the ZnO films with highly c-axis (002) preferred orientation were grown by RF magnetron sputtering on Si(100), glass and Pt(111)/Ti/SiO2/Si(100) substrates respectively.

Key words: ceramic target, zinc oxide films, RF magnetron sputtering, preferred orientation