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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Li-doped ZnO Ceramic Target Preparation and RF Magnetron Sputtering ZnO Films
CHEN Zhu,ZHANG Shu-Ren,DU Shan-Yi,YANG Cheng-Tao,ZENG Ze-Yu,LI Bo,SUN Ming-Xia
Journal of Inorganic Materials . 2006, (
4
): 1011 -1017 . DOI: 10.3724/SP.J.1077.2006.01011
