Effect of Annealing Temperature on the Mechanical Properties of Bi3.15(Eu0.7Nd0.15)Ti3O12 Ferroelectric Thin Films

doi:10.3724/SP.J.1077.2013.12201

Abstract

Abstract:

Bi_3.15(Eu_0.7Nd_0.15)Ti₃O₁₂ (BENT) thin films were deposited on Pt/Ti/SiO₂/Si(111) substrates via metal- organic decomposition (MOD) and annealed at 600℃, 650℃, 700℃ and 750℃. The hardness and elastic modulus were measured by nanoindentation, and the residual stress was measured by X-ray diffraction (XRD). The grain sizes of the BENT thin films increase with the annealing temperatures increasing. With the grain size increasing from 37 nm to 46 nm, the hardness decreases from 8.4 GPa to 3.1 GPa and the elastic modulus decreases from 171.5 GPa to 141.6 GPa. While the annealing temperature increases from 600℃ to 750℃, the residual stress decreases from -743 MPa to -530 MPa. The BENT thin film annealed at 600℃ shows the largest hardness and elastic modulus.

Key words: elastic modulus, hardness, residual stress, annealing temperature

CLC Number:

TQ174

JIANG Da-Dong, ZHENG Xue-Jun, GONG Yue-Qiu, ZHU-Zhe, PENG Jin-Feng. Effect of Annealing Temperature on the Mechanical Properties of Bi_3.15(Eu_0.7Nd_0.15)Ti₃O₁₂ Ferroelectric Thin Films[J]. Journal of Inorganic Materials, 2013, 28(2): 131-135.

Figures/Tables 7

Fig. 1 (a) XRD patterns of BENT thin films annealed at 600℃, 650℃, 700℃, 750℃, (b) EDS analysis of BENT thin film annealed at 750℃

Fig. 2 Surface morphology (a) and typical cross-sectional micrograph (b) of BENT thin film annealed at 750℃

Fig. 3 Typical load-displacement indentation curves of BENT thin films annealed at different annealing temperatures

Fig. 4 Hardness versus annealing temperature and elastic modulus vs annealing temperature curves for BENT thin films

Fig. 5 XRD peaks of BENT (117) plane for different annealing temperature with different tilt angles ψ

Fig. 6 Plots of 2θψ-sin2ψ for BENT thin films annealed at different temperature

Fig. 7 Residual stress and grain size for BENT thin films as functions of annealing temperature

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Effect of Annealing Temperature on the Mechanical Properties of Bi_3.15(Eu_0.7Nd_0.15)Ti₃O₁₂ Ferroelectric Thin Films

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