Abstract: Film Humidity sensors of Cu, Zn, Fe, Sb, Ti and so on sulfide systenis were prepared by the Sol-gel mcthod aceording to the idea of developing a kind of pure physisorbed surface (without chemisorption). It was found that the filmhumidity sensors of sulfide systems possess the properties of high sensitivity, small hysterisis, and rapid responsc, and the sensors made of sulfide films of metal cations with Large charge-radius ratio have all excellent durability, these agree with our cxpectant results.

Key words: sulfide, film humidity sensor, ceramic humidity sensor