Abstract: A sol-gel process was used to synthesize borophosphosilicate ultrafine powders by using boric acid, phosphoric acid and TEOS as starting precursors. The powder can be sintered at 900℃ in air. The dielectric properties of the sintered glass-ceramics were measured. The results show that the sintered glass-ceramics possess dielectric constants less than 5 and dielectric loss less than 3×10^-3 at the frequency of 1MHz. The glass-ceramics are potential for using as dielectric materials in a super high frequency multi-layer chip inductor field.

Key words: sol-gel method, ultrafine powder, glass-ceramics, low dielectric, multi-layer chip induc