Time Domain Dielectric spectra of depletion Layer

Abstract

Abstract: Because of slow polarization and non-linear effects, the dynamic properties of Metal-Semiconductor-Insulator-Metal (MSIM) layer were obtained incorrectly by frequency domian spectra with sinusoidal current. For this structure, time domain dielectric spectra can distinguish the effects reliably between contact and insulating layer of MOS structure. More important information of space charges motion can also be obtained by this method.

Key words: time domain dielectric spectrum, depletion layer, slica, silicon single crystal

CLC Number:

TN304

CHEN Min,SUN Shao-Feng,LI Jing-De. Time Domain Dielectric spectra of depletion Layer[J]. Journal of Inorganic Materials.

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Time Domain Dielectric spectra of depletion Layer

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